MEM switching device

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 7317232
APP PUB NO 20050040484A1
SERIAL NO

10689167

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A MEM device and method for fabricating a MEM device. A MEM device comprising a lever mechanism residing along a substrate is disclosed. A contact material is deposited on a first surface of the lever mechanism. In one arrangment, the first surface is disposed towards the substrate. A first contact region may be deposited on the substrate. The first contact region attracts the lever mechanism towards the substrate such that the contact material becomes operationally coupled to a second contact region. The MEM device may also comprise a first anchor portion and a second anchor portion. The first and second anchor portions may be integral to a top surface of the substrate. Aspects of the invention are also particularly useful in providing an encapsulated MEM switching device.

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First Claim

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Patent Owner(s)

Patent OwnerAddress
CABOT MICROELECTRONICS CORPORATION870 NORTH COMMONS DRIVE AURORA IL 60504

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Busta, Heinz H Park Ridge, IL 35 1174

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