Method and apparatus for pad aligned multiprobe wafer testing
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United States of America Patent
Stats
-
Jan 15, 2008
Grant Date -
Aug 2, 2007
app pub date -
Jan 17, 2007
filing date -
Feb 25, 2005
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A control unit of a wafer prober for implementing wafer examination, using a probe card including a multiple number of probes, executes a multiple number of measuring operations by bringing the probes of the probe card into contact with bonding pads formed on a wafer and by measuring the electric characteristics between predetermined pads of the bonding pads, each of the measuring operations being implemented after varying the relative position between the probe card and the wafer, in directions parallel to the face of the wafer. The control unit, upon execution of each of the measuring operations, implements the measuring operation after adjusting the relative position between the probe card and the wafer so that the contact position of each probe of the probes against each pad of the bonding pads is separated from all the positions at which the probes have already touched that pad of the bonding pads for a predetermined number of different times.
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