Process and structure for fabrication of MEMS device having isolated edge posts
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Jan 22, 2008
Grant Date -
Dec 6, 2007
app pub date -
Jun 1, 2006
filing date -
Jun 1, 2006
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A method of fabricating an array of MEMS devices includes the formation of support structures located at the edge of upper strip electrodes. A support structure is etched to form a pair of individual support structures located at the edges of a pair of adjacent electrodes. The electrodes themselves may be used as a hard mask during the etching of these support structures. A resultant array of MEMS devices includes support structures having a face located at the edge of an overlying electrode and coincident with the edge of the overlying electrode.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully