Apparatus and method for applying diamond-like carbon coatings
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United States of America Patent
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Jan 29, 2008
Grant Date -
Jun 16, 2005
app pub date -
Mar 14, 2003
filing date -
Mar 14, 2002
priority date (Note) -
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Abstract
The invention relates to a coating and apparatus and method for applying the same, said coating including Diamond Like Carbon (DLC) applied by chemical vapor deposition using a pulsed DC biased power supply, typically having an initial metal layer and followed by a transitional metal carbide layer and a DLC layer. The depths and transitions between the materials can be selected to suit requirements. The apparatus also includes the use of an arrangement with at least one electrode with an RF power supply and the selective control of the power supplies to the electrode and substrates is used to improve the efficiency of application.
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