Optical deflection probe and optical deflection probe device
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United States of America Patent
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-
Jan 29, 2008
Grant Date -
Nov 16, 2006
app pub date -
Apr 11, 2006
filing date -
Apr 12, 2005
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
An optical fiber transmits signal light and the excitation light for driving an actuator each having a different wavelength to a probe. In the probe, the signal light and excitation light are separated from each other by an optical filter and the excitation light is irradiated to a photo diode. The signal light is supplied to a MEMS mirror unit. Then, the MEMS mirror unit is driven by an electromotive force obtained by the photo diode. In this manner, by modulating intensity of the excitation light, the signal light can be deflected.
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