Integrated thin film capacitor/inductor/interconnect system and method

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 7327582
APP PUB NO 20050175938A1
SERIAL NO

11084675

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

A system and method for the fabrication of high reliability capacitors (1011), inductors (1012), and multi-layer interconnects (1013) (including resistors (1014)) on various thin film hybrid substrate surfaces (0501) is disclosed. The disclosed method first employs a thin metal layer (0502) deposited and patterned on the substrate (0501). This thin patterned layer (0502) is used to provide both lower electrodes for capacitor structures (0603) and interconnects (0604) between upper electrode components. Next, a dielectric layer (0705) is deposited over the thin patterned layer (0502) and the dielectric layer (0705) is patterned to open contact holes (0806) to the thin patterned layer. The upper electrode layers (0907, 0908, 1009, 1010) are then deposited and patterned on top of the dielectric (0705).

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddressTotal Patents
Ultrasource, Inc.HOLLIS, NH0

International Classification(s)

  • [Classification Symbol]
  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Casper, Michael D Nashua, NH 6 92
Mraz, William B Newfield, NH 10 117

Cited Art Landscape

Patent Info (Count) # Cites Year
 
MATSUSHITA ELECTRONICS CORPORATION (1)
5822175 Encapsulated capacitor structure having a dielectric interlayer 33 1997
 
MICRON TECHNOLOGY, INC. (1)
5982018 Thin film capacitor coupons for memory modules and multi-chip modules 57 1997
 
TDK CORPORATION (2)
5643804 Method of manufacturing a hybrid integrated circuit component having a laminated body 78 1994
5877533 Hybrid integrated circuit component 77 1997
 
SAMSUNG ELECTRONICS CO., LTD. (1)
5955774 Integrated circuit ferroelectric memory devices including resistors in periphery region 18 1997
 
POLYPLASMA INC. (1)
4599678 Plasma-deposited capacitor dielectrics 25 1985
 
LG SEMICON CO., LTD. (3)
5874379 Dielectric thin film and fabrication method thereof 23 1996
5741722 Method for manufacturing DRAM device using high dielectric constant 27 1996
6078093 Capacitor structure of semiconductor device for high dielectric constant 10 1997
 
NEC CORPORATION (5)
5122923 Thin-film capacitors and process for manufacturing the same 133 1990
5262920 Thin film capacitor 45 1992
5539613 Compact semiconductor device including a thin film capacitor of high reliability 15 1993
5670408 Thin film capacitor with small leakage current and method for fabricating the same 10 1995
6072205 Passive element circuit 19 1998
 
RENESAS ELECTRONICS CORPORATION (3)
5883781 Highly-integrated thin film capacitor with high dielectric constant layer 17 1996
5943547 Method of forming highly-integrated thin film capacitor with high dielectric constant layer 15 1997
6081417 Capacitor having a ferroelectric layer 16 1998
 
C. ITOH FINE CHEMICAL CO., LTD. (1)
5258886 Thin film capacitor and apparatus for manufacturing same 20 1992
 
BOARD OF TRUSTEES OF THE UNIVERSITY OF ARKANSAS (1)
6023408 Floating plate capacitor with extremely wide band low impedance 14 1996
 
KABUSHIKI KAISHA TOSHIBA (2)
5760432 Thin film strained layer ferroelectric capacitors 25 1995
5889299 Thin film capacitor 34 1997
 
NORTHROP GRUMMAN CORPORATION (1)
5693595 Integrated thin-film terminations for high temperature superconducting microwave components 10 1995
 
SYMETRIX CORPORATION (1)
5708302 Bottom electrode structure for dielectric capacitors 38 1995
 
OKI SEMICONDUCTOR CO., LTD. (1)
6096600 Method of forming a capacitative section of a semiconductor device and method of forming a capacitative section and gate section of a semiconductor device 8 1998
 
SHARP KABUSHIKI KAISHA (1)
5907470 Dielectric thin film capacitor element 23 1997
 
INTERNATIONAL BUSINESS MACHINES CORPORATION (6)
4408254 Thin film capacitors 8 1981
4423087 Thin film capacitor with a dual bottom electrode structure 32 1981
4471405 Thin film capacitor with a dual bottom electrode structure 44 1983
5912044 Method for forming thin film capacitors 29 1997
6001702 Metal to metal capacitor and method for producing same 21 1998
6023407 Structure for a thin film multilayer capacitor 43 1998
 
GENERAL ELECTRIC COMPANY (3)
5736448 Fabrication method for thin film capacitors 97 1995
5872040 Method for fabricating a thin film capacitor 13 1997
5973908 Structure for thin film capacitors 28 1997
 
3M INNOVATIVE PROPERTIES COMPANY (1)
5737179 Metallized film capacitor 25 1996
 
LUCENT TECHNOLOGIES INC. (2)
5936831 Thin film tantalum oxide capacitors and resulting product 39 1997
6075691 Thin film capacitors and process for making them 68 1997
 
RAMTRON INTERNATIONAL CORPORATION (1)
5789323 Fabrication of metal-ferroelectric-metal capacitors with a two step patterning sequence 13 1995
 
NGK SPARK PLUG CO., LTD. (2)
5685968 Ceramic substrate with thin-film capacitor and method of producing the same 28 1995
5781081 LC-type dielectric filter having an inductor on the outermost layer and frequency adjusting method therefor 11 1996
 
BLACKBERRY LIMITED (1)
5745335 Multi-layer film capacitor structures and method 48 1996
 
FUJITSU LIMITED (4)
4364099 Tantalum thin film capacitor 38 1980
5455064 Process for fabricating a substrate with thin film capacitor and insulating plug 33 1993
5882946 High-permittivity thin film capacitor for a semiconductor integrated circuit and a fabrication method thereof 50 1995
6040594 High permittivity ST thin film and a capacitor for a semiconductor integrated circuit having such a thin film 11 1998
 
THE RESEARCH FOUNDATION FOR THE STATE UNIVERSITY OF NEW YORK (2)
5390072 Thin film capacitors 36 1992
5587870 Nanocrystalline layer thin film capacitors 71 1994
 
ITT CORPORATION (1)
5338950 Multiple port thin film capacitor 7 1993
 
AT & T TECHNOLOGIES, INC., (1)
4410867 Alpha tantalum thin film circuit device 36 1980
 
KYOCERA MITA CORPORATION (1)
5767564 Semiconductor device with a decoupling capacitor mounted thereon having a thermal expansion coefficient matched to the device 59 1996
 
Asahi Kasei Microsystems Co., Ltd. (1)
6069388 Semiconductor device and production method thereof 10 1997
 
North American Philips Corporation (1)
4631633 Thin film capacitors and method of making the same 14 1985
 
Ultrasource, Inc. (3)
6761963 Integrated thin film capacitor/inductor/interconnect system and method 21 2001
2004/0080,021 Integrated thin film capacitor/inductor/interconnect system and method 15 2003
2004/0081,811 Integrated thin film capacitor/inductor/interconnect system and method 15 2003
 
TEXAS INSTRUMENTS INCORPORATED (1)
5973911 Ferroelectric thin-film capacitor 66 1997
 
MITSUBISHI DENKI KABUSHIKI KAISHA (2)
5382817 Semiconductor device having a ferroelectric capacitor with a planarized lower electrode 65 1993
5436477 Semiconductor memory device with high dielectric capacitor structure 62 1994
 
ROHM CO., LTD. (1)
5699224 Thick-film capacitor and chip-type composite electronic component utilizing the same 11 1996
 
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. (1)
5818079 Semiconductor integrated circuit device having a ceramic thin film capacitor 28 1996
* Cited By Examiner

Patent Citation Ranking

Forward Cite Landscape

Patent Info (Count) # Cites Year
 
HAMILTON SUNDSTRAND CORPORATION (2)
8897023 Motor controller assembly with capacitor thermal isolation 0 2009
* 2010/0290,204 MOTOR CONTROLLER ASSEMBLY WITH CAPACITOR THERMAL ISOLATION 2 2009
 
Ultrasource, Inc. (2)
* 7446388 Integrated thin film capacitor/inductor/interconnect system and method 7 2005
* 2006/0097,344 Integrated thin film capacitor/inductor/interconnect system and method 0 2005
 
RENESAS ELECTRONICS CORPORATION (1)
* 2016/0260,795 METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE 0 2016
 
STMicroelectronics S.A. (2)
* 8587921 Method of adjustment on manufacturing of a circuit having a resonant element 2 2010
* 8756778 Method of adjustment during manufacture of a circuit having a capacitor 0 2011
 
MURATA MANUFACTURING CO., LTD. (1)
8803633 Directional coupler 0 2013
 
ADVANCED SEMICONDUCTOR ENGINEERING, INC. (1)
8853819 Semiconductor structure with passive element network and manufacturing method thereof 1 2011
* Cited By Examiner

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
11.5 Year Payment $7400.00 $3700.00 $1850.00 Aug 5, 2019
Fee Large entity fee small entity fee micro entity fee
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00