Ceramic article having corrosion-resistant layer, semiconductor processing apparatus incorporating same, and method for forming same
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United States of America Patent
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Feb 12, 2008
Grant Date -
Feb 24, 2005
app pub date -
Aug 22, 2003
filing date -
Aug 22, 2003
priority date (Note) -
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Abstract
An article is provided that includes a substrate and a corrosion-resistant coating provided on the substrate. The substrate generally consists essentially of alumina, and the corrosion-resistant coating is provided so as to directly contact the substrate without the provision of intervening layers between the substrate and the corrosion-resistant coating, such as reaction products provided by high-temperature treatment processes. The corrosion-resistant coating generally consists essentially of a rare earth oxide, and has an adhesion strength not less than about 15 MPa. According to particular embodiments, the article is a ceramic component utilized and implemented in a semiconductor processing apparatus for processing semiconductor wafers.
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