Method and apparatus for separation of moisture from fluids
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United States of America Patent
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Feb 19, 2008
Grant Date -
Mar 30, 2006
app pub date -
Sep 24, 2004
filing date -
Sep 24, 2004
priority date (Note) -
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Abstract
Apparatus and methods useful for removal or reduction of moisture from fluids are described. In one embodiment the apparatus comprises a moisture separation unit comprising a thermally regenerable moisture adsorption material having feed and waste sides, and means for regenerating the thermally regenerable moisture adsorption material. The feed fluid contacts the feed side, while a dry, preferably heated purge gas flows past the waste side. The thermally regenerable moisture adsorption material is regenerated by contacting with the heated dry purge gas. The apparatus and methods are particularly useful in supplying dehydrated electronic specialty gases to semiconductor tools.
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