Prober and probe testing method for temperature-controlling object to be tested
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United States of America Patent
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Feb 19, 2008
Grant Date -
Feb 16, 2006
app pub date -
Aug 18, 2005
filing date -
Oct 21, 2002
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A prober which tests an object to be tested under temperature control is provided. This prober includes a stage base, Z stage, X-Y stage having a frame structure, substrate fixing mechanism arranged on the X-Y stage, a probe card arranged to oppose the substrate fixing mechanism, and a probing stage fixed on the Z stage and arranged in the frame structure of the X-Y stage such that its axis coincides with an extension line vertically extending from the probe center of the probe card. The probing stage includes a probing elevating mechanism, and a temperature controller to heat and cool the object to be tested. The probing stage supports the substrate of the object to be tested from the bottom surface, and controls the temperature of the object to be tested.
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