Automated design and execution of experiments with integrated model creation for semiconductor manufacturing tools
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United States of America Patent
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Feb 19, 2008
Grant Date -
Jul 29, 2004
app pub date -
Jan 20, 2004
filing date -
Jan 21, 2003
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A method, system and medium of automation performed on a semiconductor manufacturing tool. The method creates a designed set of experiments for the tool and runs the created set of experiments. The method also collects data resulting from running the experiments and creates a model based on the collected data. The created model is used in automatically controlling the tool.
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