Dual membrane sensor for temperature compensated pressure sensing
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United States of America Patent
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Feb 26, 2008
Grant Date -
Jun 28, 2007
app pub date -
Dec 21, 2006
filing date -
Oct 18, 2004
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A pressure sensor that has a sensor membrane for exposure to fluid at a pressure to be sensed, and a compensation membrane sealed from the fluid at the pressure to be sensed. Associated circuitry connected to the sensor membrane converts deflection into an output signal indicative of the fluid pressure. The circuitry also connects to the compensation membrane to convert deflection into an adjustment to the output signal that compensates for membrane deflection due to thermal expansion.
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