System and method for fabricating logic devices comprising carbon nanotube transistors
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United States of America Patent
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Feb 26, 2008
Grant Date -
Sep 27, 2001
app pub date -
Feb 7, 2001
filing date -
Feb 7, 2000
priority date (Note) -
Expired
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Abstract
Carbon nanotube devices and methods for fabricating these devices, wherein in one embodiment, the fabrication process consists of the following process steps: (1) generation of a template, (2) catalyst deposition, and (3) nanotube synthesis within the template. In another embodiment, a carbon nanotube transistor comprises a carbon nanotube having two or more defects, wherein the defects divide the carbon nanotube into three regions having differing conductivities. The defects may be introduced by varying the diameter of a template in which the carbon nanotube is fabricated and thereby causing pentagon-heptagon pairs which form the defects.
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