Inspection system and apparatus
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United States of America Patent
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Feb 26, 2008
Grant Date -
Jan 11, 2007
app pub date -
Sep 12, 2006
filing date -
Feb 3, 2003
priority date (Note) -
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status (Latency Note)
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Abstract
A method and system for identifying a defect or contamination on a surface of a sample. The system operates by detecting changes in work function across a surface via both vCPD and nvCPD. It utilizes a non-vibrating contact potential difference (nvCPD) sensor for imaging work function variations over an entire sample. The data is differential in that it represents changes in the work function (or geometry or surface voltage) across the surface of a sample. A vCPD probe is used to determine absolute CPD data for specific points on the surface of the sample. The combination of vibrating and non-vibrating CPD measurement modes allows the rapid imaging of whole-sample uniformity, and the ability to detect the absolute work function at one or more points.
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