Intelligent measurement modular semiconductor parametric test system
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United States of America Patent
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Feb 26, 2008
Grant Date -
Feb 6, 2003
app pub date -
Apr 25, 2002
filing date -
May 23, 2001
priority date (Note) -
Expired
status (Latency Note)
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Abstract
An intelligent measurement modular semiconductor parametric test system comprises an engine control module. The engine control module is operable to communicate with a user via a user interface, and is further operable to communicate with and to control the state of at least one other module in the semiconductor parametric test system including pluggable modules. The engine control module is further operable to control test flow via a test monitor module based on data and control events received from an intelligent measurement module. Other modules in various embodiments comprise prober monitor modules.
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