Method of recipe control operation
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United States of America Patent
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Mar 4, 2008
Grant Date -
Oct 19, 2006
app pub date -
Apr 13, 2005
filing date -
Apr 13, 2005
priority date (Note) -
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status (Latency Note)
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Abstract
An operation method of a recipe control process in which multiple processing targets are processed continuously in a processing apparatus using recipes that specify a set of control parameters specifying the processing conditions of processing targets. The method comprises the steps of: (I) specifying correction coefficients to correct at least one of the parameters' values for each processing target, separately from the recipes, and (II) performing the recipe control process for multiple processing targets and applying the correction coefficients to each processing target to adjust the parameters' values.
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