Method of probing a device using captured image of probe structure in which probe tips comprise alignment features
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United States of America Patent
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Mar 11, 2008
Grant Date -
Oct 14, 2004
app pub date -
Apr 10, 2003
filing date -
Apr 10, 2003
priority date (Note) -
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status (Latency Note)
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Abstract
An image of an array of probes is searched for alignment features. The alignment features are then used to bring contact targets and the probes into contact with one another. The alignment features may be a feature of one or more of the tips of the probes. For example, such a feature may be a corner of one of the tips. An array of probes may be formed to have such alignment features.
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