Process for manufacturing a multipolar electrode arrangement and multipolar electrode arrangement
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United States of America Patent
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Mar 25, 2008
Grant Date -
May 18, 2006
app pub date -
Nov 11, 2005
filing date -
Nov 12, 2004
priority date (Note) -
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Abstract
A method for the production of a multipolar electrode configuration (1) for focussing or mass filtration of a beam of charged particles includes attaching a number of round-pole shaped electrode blanks (9)--but only a fraction of the total number of electrodes (2) required for said electrode configuration (1)--to one or a number of support elements (4); simultaneous processing of the end parts (6) of the support element(s) (4) and of the electrode blanks (9) attached to the support element(s) (4) in one process step in such a way that each electrode blank (9) is processed into an electrode (2) with a cross section, having a circular section (KA) and a non-circular, section (HA), and at the end of said simultaneous processing the support element(s) (4) having two differently shaped end parts (6), whereby the respective shapes of said end parts (6) are adapted to each other.
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