US Patent No: 7,348,787

Number of patents in Portfolio can not be more than 2000

Wafer probe station having environment control enclosure

ALSO PUBLISHED AS: 20060132157

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Abstract

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A wafer probe station is equipped with an integrated environment control enclosure substantially surrounding a supporting surface for holding a test device, such enclosure limiting fluid communication between the interior and exterior of the enclosure and preferably also providing EMI shielding and a dark environment. The limited communication between the interior and exterior of the enclosure is kept substantially constant despite positioning movement of either the supporting surface or probes. The positioning mechanisms for the supporting surface and probes each are located at least partially outside of the enclosure.

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Patent Owner(s)

Patent OwnerAddressTotal Patents
CASCADE MICROTECH, INC.BEAVERTON, OR260

International Classification(s)

  • [Classification Symbol]
  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Harwood, Warren K Vancouver, WA 37 1315
Koxxy, Martin J Hillsboro, OR 25 702
Tervo, Paul A Vancouer, WA 71 1643

Cited Art Landscape

Patent Info (Count) # Cites Year
 
CASCADE MICROTECH, INC. (61)
4,280,112 Electrical coupler 98 1979
4,697,143 Wafer probe 197 1984
4,827,211 Wafer probe 125 1987
4,858,160 System for setting reference reactance for vector corrected measurements 99 1988
4,849,689 Microwave wafer probe having replaceable probe tip 125 1988
4,994,737 System for facilitating planar probe measurements of high-speed interconnect structures 57 1990
5,045,781 High-frequency active probe having replaceable contact needles 109 1991
5,101,453 Fiber optic wafer probe 98 1991
5,237,267 Wafer probe station having auxiliary chucks 52 1992
5,266,889 Wafer probe station with integrated environment control enclosure 133 1992
5,345,170 Wafer probe station having integrated guarding, Kelvin connection and shielding systems 115 1992
5,457,398 Wafer probe station having full guarding 122 1993
5,434,512 Wafer probe station having integrated guarding, Kelvin connection and shielding systems 59 1994
5,506,515 High-frequency probe tip assembly 155 1994
5,532,609 Wafer probe station having environment control enclosure 70 1995
5,561,377 System for evaluating probing networks 64 1995
5,610,529 Probe station having conductive coating added to thermal chuck insulator 136 1995
5,565,788 Coaxial wafer probe with tip shielding 145 1995
5,663,653 Wafer probe station for low-current measurements 71 1995
5,729,150 Low-current probe card with reduced triboelectric current generating cables 135 1995
5,604,444 Wafer probe station having environment control enclosure 62 1996
5,659,255 Method of evaluating signal conditions in a probe measurement network having a plurality of separate measurement channels 58 1996
6,313,649 Wafer probe station having environment control enclosure 55 1997
6,232,788 Wafer probe station for low-current measurements 87 1997
6,232,789 Probe holder for low current measurements 87 1997
5,869,975 System for evaluating probing networks that have multiple probing ends 56 1997
5,963,027 Probe station having environment control chambers with orthogonally flexible lateral wall assembly 71 1997
6,002,263 Probe station having inner and outer shielding 59 1997
6,034,533 Low-current pogo probe card 107 1997
6,137,302 Low-current probe card with reduced triboelectric current generating cables 107 1997
5,973,505 System for evaluating probing networks 54 1998
6,445,202 Probe station thermal chuck with shielding for capacitive current 50 1999
6,252,392 Probe station having environment control chamber with bendably extensible and retractable lateral wall assembly 51 1999
6,130,544 System for evaluating probing networks 51 1999
6,288,557 Probe station having inner and outer shielding 51 1999
6,578,264 Method for constructing a membrane probe using a depression 77 2000
6,483,336 Indexing rotatable chuck for a probe station 52 2000
6,608,496 Reference transmission line junction for probing device 56 2000
6,335,628 Wafer probe station for low-current measurements 52 2001
6,380,751 Wafer probe station having environment control enclosure 49 2001
6,362,636 Probe station having multiple enclosures 53 2001
6,549,106 Waveguide with adjustable backshort 110 2001
6,492,822 Wafer probe station for low-current measurements 50 2001
6,489,789 Probe station having multiple enclosures 50 2001
6,486,687 Wafer probe station having environment control enclosure 50 2002
6,771,090 Indexing rotatable chuck for a probe station 53 2002
6,836,135 Optical testing device 49 2002
6,636,059 Wafer probe station having environment control enclosure 49 2002
6,639,415 Probe station having multiple enclosures 49 2002
6,720,782 Wafer probe station for low-current measurements 47 2002
6,777,964 Probe station 52 2002
6,724,205 Probe for combined signals 97 2002
6,642,732 Probe station thermal chuck with shielding for capacitive current 47 2002
6,861,856 Guarded tub enclosure 50 2002
6,801,047 Wafer probe station having environment control enclosure 47 2003
6,842,024 Probe station having multiple enclosures 47 2003
6,847,219 Probe station with low noise characteristics 59 2003
6,806,724 Probe for combined signals 94 2003
6,885,197 Indexing rotatable chuck for a probe station 47 2004
7,009,383 Wafer probe station having environment control enclosure 92 2004
7,187,188 Chuck with integrated wafer support 76 2004
 
AGILENT TECHNOLOGIES, INC. (34)
4,588,970 Three section termination for an R.F. triaxial directional bridge 51 1984
4,703,433 Vector network analyzer with integral processor 104 1984
4,816,767 Vector network analyzer with integral processor 105 1986
4,771,234 Vacuum actuated test fixture 104 1986
4,918,383 Membrane probe with automatic contact scrub action 154 1988
4,906,920 Self-leveling membrane probe 203 1988
5,172,051 Wide bandwidth passive probe 109 1991
5,298,972 Method and apparatus for measuring polarization sensitivity of optical devices 109 1991
5,274,336 Capacitively-coupled test probe 136 1992
5,493,070 Measuring cable and measuring system 92 1994
5,680,039 Probe apparatus for use in both high and low frequency measurements 48 1995
5,578,932 Method and apparatus for providing and calibrating a multiport network analyzer 145 1995
5,945,836 Loaded-board, guided-probe test fixture 121 1996
5,923,177 Portable wedge probe for perusing signals on the pins of an IC 49 1997
5,903,143 Probe apparatus with RC circuit connected between ground and a guard 93 1997
6,060,888 Error correction method for reflection measurements of reciprocal devices in vector network analyzers 112 1998
6,251,595 Methods and devices for carrying out chemical reactions 105 1998
6,175,228 Electronic probe for measuring high impedance tri-state logic circuits 83 1998
6,300,775 Scattering parameter calibration system and method 128 1999
6,271,673 Probe for measuring signals 102 1999
6,407,562 Probe tip terminating device providing an easily changeable feed-through termination 91 1999
2001/0024,116 Electronic probe for measuring high impedance tri-state logic circuits 78 2001
6,643,597 Calibrating a test system using unknown standards 115 2001
6,717,426 Blade-like connecting needle 78 2002
6,768,328 Single point probe structure and method 74 2002
6,873,167 Connection box, system, and method for evaluating a DUT board 51 2002
6,864,694 Voltage probe 90 2002
2004/0095,145 Method and apparatus for performing multiport through-reflect-line calibration and measurement 96 2002
2004/0199,350 System and method for determining measurement errors of a testing device 93 2003
2005/0030,047 Method and apparatus for measuring a device under test using an improved through-reflect-line measurement calibration 83 2003
7,025,628 Electronic probe extender 103 2003
2004/0162,689 Multiport network analyzer calibration employing reciprocity of a device 93 2004
7,005,868 Apparatus and method for canceling DC errors and noise generated by ground shield current in a probe 92 2004
7,026,834 Multiple two axis floating probe block assembly using split probe block 92 2005
 
TOKYO ELECTRON LIMITED (32)
4,884,026 Electrical characteristic measuring apparatus 73 1988
5,084,671 Electric probing-test machine having a cooling system 177 1990
5,091,692 Probing test device 113 1990
5,198,752 Electric probing-test machine having a cooling system 152 1991
5,315,237 Touch sensor unit of prober for testing electric circuit and electric circuit testing apparatus using the touch sensor unit 107 1991
5,278,494 Wafer probing test machine 93 1992
5,321,352 Probe apparatus and method of alignment for the same 131 1992
5,321,453 Probe apparatus for probing an object held above the probe card 101 1992
5,325,052 Probe apparatus 144 1992
5,410,259 Probing device setting a probe card parallel 140 1993
5,404,111 Probe apparatus with a swinging holder for an object of examination 112 1993
5,521,522 Probe apparatus for testing multiple integrated circuit dies 143 1993
5,539,676 Method of identifying probe position and probing method in prober 93 1994
5,550,482 Probe device 98 1994
5,777,485 Probe method and apparatus with improved probe contact 118 1996
5,640,101 Probe system and probe method 68 1996
5,828,225 Semiconductor wafer probing apparatus 71 1996
5,910,727 Electrical inspecting apparatus with ventilation system 89 1996
5,804,983 Probe apparatus with tilt correction mechanisms 151 1997
5,926,028 Probe card having separated upper and lower probe needle groups 38 1997
5,999,268 Apparatus for aligning a semiconductor wafer with an inspection contactor 109 1997
6,060,892 Probe card attaching mechanism 94 1997
6,037,793 Inspecting method and apparatus for semiconductor integrated circuit 73 1998
6,124,725 Apparatus and method for testing semiconductor devices formed on a semiconductor wafer 133 1998
6,501,289 Inspection stage including a plurality of Z shafts, and inspection apparatus 83 2000
6,414,478 Transfer mechanism for use in exchange of probe card 79 2000
7,005,842 Probe cartridge assembly and multi-probe assembly 92 2001
7,101,797 Substrate processing device and processing method 46 2003
6,794,888 Probe device 75 2003
7,026,832 Probe mark reading device and probe mark reading method 95 2003
7,009,415 Probing method and probing apparatus 94 2004
7,023,226 Probe pins zero-point detecting method, and prober 92 2004
 
INTERNATIONAL BUSINESS MACHINES CORPORATION (19)
4,744,041 Method for testing DC motors 117 1985
4,831,494 Multilayer capacitor 153 1988
4,922,128 Boost clock circuit for driving redundant wordlines and sample wordlines 79 1989
5,001,423 Dry interface thermal chuck temperature control system for semiconductor wafer testing 133 1990
5,144,228 Probe interface assembly 86 1991
5,210,485 Probe for wafer burn-in test system 100 1991
5,334,931 Molded test probe assembly 92 1991
5,221,905 Test system with reduced test contact interface resistance 58 1992
5,546,012 Probe card assembly having a ceramic probe card 64 1994
5,530,371 Probe card assembly 67 1995
5,629,631 Interface card for a probe card assembly 86 1995
5,804,982 Miniature probe positioning actuator 104 1995
5,561,585 Electrostatic chuck with reference electrode 63 1995
6,043,667 Substrate tester location clamping, sensing, and contacting method and apparatus 75 1997
6,791,344 System for and method of testing a microelectronic device using a dual probe technique 62 2000
6,788,093 Methodology and apparatus using real-time optical signal for wafer-level device dielectrical reliability studies 104 2002
7,007,380 TFI probe I/O wrap test method 92 2004
7,011,531 Membrane probe with anchored elements 92 2005
7,005,879 Device for probe card power bus noise reduction 92 2005
 
TEKTRONIX, INC. (11)
4,739,259 Telescoping pin probe 100 1986
4,758,785 Pressure control apparatus for use in an integrated circuit testing station 114 1986
4,673,839 Piezoelectric pressure sensing apparatus for integrated circuit testing stations 123 1986
4,783,625 Wideband high impedance card mountable probe 95 1988
4,838,802 Low inductance ground lead 49 1988
4,923,407 Adjustable low inductance probe 73 1989
5,136,237 Double insulated floating high voltage test probe 103 1991
5,225,796 Coplanar transmission structure having spurious mode suppression 57 1992
5,412,330 Optical module for an optically based measurement system 94 1993
6,447,339 Adapter for a multi-channel signal probe 85 2001
6,701,265 Calibration for vector network analyzer 92 2002
 
MICRON TECHNOLOGY, INC. (9)
5,461,328 Fixture for burn-in testing of semiconductor wafers 94 1993
5,838,161 Semiconductor interconnect having test structures for evaluating electrical characteristics of the interconnect 84 1996
6,060,891 Probe card for semiconductor wafers and method and system for testing wafers 149 1997
6,181,144 Semiconductor probe card having resistance measuring circuitry and method fabrication 141 1998
6,194,720 Preparation of transmission electron microscope samples 108 1998
6,774,651 Method for aligning and connecting semiconductor components to substrates 64 2000
6,359,456 Probe card and test system for semiconductor wafers 114 2001
7,026,835 Engagement probe having a grouping of projecting apexes for engaging a conductive pad 92 2002
7,009,188 Lift-out probe having an extension tip, methods of making and using, and analytical instruments employing same 96 2004
 
ADVANTEST CORPORATION (8)
5,172,049 IC test equipment 128 1991
5,644,248 Test head cooling system 83 1995
5,767,690 Test head cooling system 88 1997
5,952,842 Test head cooling system 58 1997
6,191,596 Method for detecting a contact position between an object to be measured and measuring pins 80 1998
6,257,319 IC testing apparatus 58 1999
2002/0011,863 IC chip tester with heating element for preventing condensation 87 2001
7,020,360 Wavelength dispersion probing system 93 2002
 
CANON KABUSHIKI KAISHA (8)
4,503,335 Semiconductor printing apparatus with multiple independent temperature control 104 1982
4,755,747 Wafer prober and a probe card to be used therewith 106 1985
4,786,867 Wafer prober 104 1987
4,864,227 Wafer prober 127 1988
4,929,893 Wafer prober 159 1988
5,304,924 Edge detector 98 1992
5,731,920 Converting adapter for interchangeable lens assembly 94 1995
5,685,232 Positioning stage device exposure apparatus and device manufacturing method utilizing the same 113 1996
 
FREESCALE SEMICONDUCTOR, INC. (8)
4,968,931 Apparatus and method for burning in integrated circuit wafers 168 1989
5,467,024 Integrated circuit test with programmable source for both AC and DC modes of operation 85 1993
5,550,480 Method and means for controlling movement of a chuck in a test apparatus 77 1994
5,617,035 Method for testing integrated devices 109 1995
5,666,063 Method and apparatus for testing an integrated circuit 106 1996
5,982,166 Method for measuring a characteristic of a semiconductor wafer using cylindrical control 107 1997
6,127,831 Method of testing a semiconductor device by automatically measuring probe tip parameters 103 1997
6,111,419 Method of processing a substrate including measuring for planarity and probing the substrate 56 1998
 
TEXAS INSTRUMENTS INCORPORATED (8)
4,888,550 Intelligent multiprobe tip 91 1983
5,103,169 Relayless interconnections in high performance signal paths 55 1989
5,070,297 Full wafer integrated circuit testing device 288 1990
5,159,752 Scanning electron microscope based parametric testing method and apparatus 118 1990
5,225,037 Method for fabrication of probe card for testing of semiconductor devices 215 1991
5,511,010 Method and apparatus of eliminating interference in an undersettled electrical signal 90 1994
6,292,760 Method and apparatus to measure non-coherent signals 92 1998
7,026,833 Multiple-chip probe and universal tester contact assemblage 95 2005
 
GLOBALFOUNDRIES INC. (7)
6,091,255 System and method for tasking processing modules based upon temperature 127 1998
6,608,494 Single point high resolution time resolved photoemission microscopy system and method 109 1998
6,483,327 Quadrant avalanche photodiode time-resolved detection 107 1999
6,724,928 Real-time photoemission detection system 96 2000
6,488,405 Flip chip defect analysis using liquid crystal 99 2000
6,617,862 Laser intrusive technique for locating specific integrated circuit current paths 97 2002
7,022,976 Dynamically adjustable probe tips 94 2003
 
The United States of America as represented by the Secretary of the Air Force (7)
4,365,109 Coaxial cable design 61 1981
4,507,602 Measurement of permittivity and permeability of microwave materials 71 1982
4,712,370 Sliding duct seal 56 1986
4,754,239 Waveguide to stripline transition assembly 90 1986
5,631,571 Infrared receiver wafer level probe testing 135 1996
6,215,295 Photonic field probe and calibration means thereof 113 1998
2003/0170,898 Method for intracellular modifications within living cells using pulsed electric fields 113 2002
 
W. L. GORE & ASSOCIATES, INC. (7)
4,871,883 Electro-magnetic shielding 115 1987
4,859,989 Security system and signal carrying member thereof 128 1987
5,061,823 Crush-resistant coaxial transmission line 125 1990
5,107,076 Easy strip composite dielectric coaxial signal cable 120 1991
5,477,011 Low noise signal transmission cable 108 1994
6,032,714 Repeatably positionable nozzle assembly 78 1999
7,015,708 Method and apparatus for a high frequency, impedance controlled probing device with flexible ground contacts 94 2003
 
APPLIED MATERIALS, INC. (6)
5,486,975 Corrosion resistant electrostatic chuck 68 1994
5,916,689 Electrostatic chuck with an impregnated, porous layer that exhibits the Johnson-Rahbeck effect 110 1996
5,874,361 Method of processing a wafer within a reaction chamber 106 1996
6,257,564 Vacuum chuck having vacuum-nipples wafer support 103 1998
6,232,787 Microstructure defect detection 157 1999
6,310,755 Electrostatic chuck having gas cavity and method 90 1999
 
MITSUBISHI DENKI KABUSHIKI KAISHA (6)
5,010,296 Wafer prober 61 1990
5,408,188 High frequency wafer probe including open end waveguide 75 1992
5,493,236 Test analysis apparatus and analysis method for semiconductor wafer using OBIC analysis 185 1994
6,144,212 Vertical needle type probe card, method of manufacturing thereof, method of replacing defective probe needle and test method of wafer using the probe card 106 1998
6,242,929 Probe needle for vertical needle type probe card and fabrication thereof 88 1998
6,404,213 Probe stylus 84 1999
 
TEMPTRONIC CORPORATION (6)
4,426,619 Electrical testing system including plastic window test chamber and method of using same 69 1981
4,491,173 Rotatable inspection table 61 1982
4,734,872 Temperature control for device under test 101 1985
4,784,213 Mixing valve air source 78 1986
4,759,712 Device for applying controlled temperature stimuli to nerve sensitive tissue 52 1986
6,415,858 Temperature control system for a workpiece chuck 93 1997
 
ENERGY, UNITED STATES DEPARTMENT OF (5)
4,287,473 Nondestructive method for detecting defects in photodetector and solar cell devices 108 1979
4,896,109 Photoconductive circuit element reflectometer 62 1987
5,523,694 Integrated circuit failure analysis by low-energy charge-induced voltage alteration 120 1994
6,307,672 Microscope collision protection apparatus 80 1996
6,407,560 Thermally-induced voltage alteration for analysis of microelectromechanical devices 86 2000
 
HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P. (5)
4,839,587 Test fixture for tab circuits and devices 125 1988
5,198,753 Integrated circuit test fixture and method 124 1990
5,198,758 Method and apparatus for complete functional testing of a complex signal path of a semiconductor chip 71 1991
6,233,613 High impedance probe for monitoring fast ethernet LAN links 92 1997
7,002,133 Detecting one or more photons from their interactions with probe photons in a matter system 92 2003
 
MDS INC. (5)
6,376,258 Resonant bio-assay device and test system for detecting molecular binding events 133 2000
6,340,568 Method for detecting and classifying nucleic acid hybridization 80 2001
6,566,079 Methods for analyzing protein binding events 95 2001
2003/0032,000 Method for analyzing cellular events 88 2001
2002/0168,659 System and method for characterizing the permittivity of molecular events 74 2002
 
SILICON VALLEY BANK (5)
4,893,914 Test station 111 1988
5,892,539 Portable emission microscope workstation for failure analysis 118 1995
6,198,299 High Resolution analytical probe station 85 1998
6,424,141 Wafer probe station 61 2000
6,744,268 High resolution analytical probe station 119 2002
 
INTEL CORPORATION (4)
5,944,093 Pickup chuck with an integral heat pipe 100 1997
7,020,363 Optical probe for wafer testing 93 2001
6,856,129 Current probe device having an integrated amplifier 90 2002
2006/0052,075 Testing integrated circuits using high bandwidth wireless technology 73 2004
 
John H. Blanz Company, Inc. (4)
5,097,207 Temperature stable cryogenic probe station 106 1989
5,077,523 Cryogenic probe station having movable chuck accomodating variable thickness probe cards 103 1990
5,160,883 Test station having vibrationally stabilized X, Y and Z movable integrated circuit receiving support 95 1990
5,166,606 High efficiency cryogenic test station 94 1990
 
NATIONAL SEMICONDUCTOR CORPORATION (4)
4,757,255 Environmental box for automated wafer probing 184 1986
5,101,149 Modifiable IC board 72 1989
5,883,522 Apparatus and method for retaining a semiconductor wafer during testing 106 1996
7,096,133 Method of establishing benchmark for figure of merit indicative of amplifier flicker noise 72 2005
 
New Wave Research (4)
5,611,946 Multi-wavelength laser system, probe station and laser cutter system using the same 88 1994
5,811,751 Multi-wavelength laser system, probe station and laser cutter system using the same 138 1997
6,573,702 Method and apparatus for cleaning electronic test contacts 102 1997
5,963,364 Multi-wavelength variable attenuator and half wave plate 119 1997
 
RAYTHEON COMPANY (4)
4,346,355 Radio frequency energy launcher 95 1980
5,600,256 Cast elastomer/membrane test probe assembly 76 1995
5,731,708 Unpackaged semiconductor testing using an improved probe and precision X-Y table 58 1995
6,211,837 Dual-window high-power conical horn antenna 76 1999
 
RENESAS ELECTRONICS CORPORATION (4)
6,028,435 Semiconductor device evaluation system using optical fiber 106 1997
6,160,407 Inspection method and wiring current observation method for semiconductor device and apparatus of the same 97 1998
6,686,753 Prober and apparatus for semiconductor chip analysis 54 2000
6,900,646 Probing device and manufacturing method thereof, as well as testing apparatus and manufacturing method of semiconductor with use thereof 96 2002
 
SONY ELECTRONICS INC. (4)
5,669,316 Turntable for rotating a wafer carrier 99 1993
6,137,303 Integrated testing method and apparatus for semiconductor test operations processing 120 1998
6,259,261 Method and apparatus for electrically testing semiconductor devices fabricated on a wafer 61 1999
2007/0024,506 Systems and methods for high frequency parallel transmissions 78 2006
 
THE BOARD OF TRUSTEES OF THE LELAND STANFORD JUNIOR UNIVERSITY (4)
5,847,569 Electrical contact probe for sampling high frequency electrical signals 95 1996
5,981,268 Hybrid biosensors 144 1997
5,802,856 Multizone bake/chill thermal cycling module 224 1997
6,051,422 Hybrid biosensors 121 1998
 
YOKOWO CO., LTD. (4)
7,019,701 Antenna device mounted on vehicle 77 2004
6,900,647 Contact probe and probe device 103 2004
6,903,563 Contact probe and probe device 97 2004
7,015,710 Contact probe and probe device 94 2004
 
ANRITSU COMPANY (3)
5,905,421 Apparatus for measuring and/or injecting high frequency signals in integrated systems 79 1997
6,169,410 Wafer probe with built in RF frequency conversion module 84 1998
6,529,844 Vector network measurement system 109 1999
 
DELAWARE CAPITAL FORMATION, INC. (3)
5,408,189 Test fixture alignment system for printed circuit boards 145 1992
6,181,149 Grid array package test contactor 97 1996
6,064,218 Peripherally leaded package test contactor 104 1997
 
ELECTROGLAS, INC. (3)
5,656,942 Prober and tester with contact interface for integrated circuits-containing wafer held docked in a vertical plane 108 1995
6,096,567 Method and apparatus for direct probe sensing 142 1997
6,320,372 Apparatus and method for testing a substrate having a plurality of terminals 100 1999
 
FormFactor, Inc. (3)
5,974,662 Method of planarizing tips of probe elements of a probe card assembly 355 1995
6,064,213 Wafer-level burn-in and test 260 1997
7,002,363 Method and system for compensating thermally induced motion of probe cards 118 2001
 
GGB INDUSTRIES, INC. (3)
5,373,231 Integrated circuit probing apparatus including a capacitor bypass structure 119 1993
6,603,322 Probe card for high speed testing 99 1996
6,118,287 Probe tip structure 101 1997
 
HARRIS CORPORATION (3)
5,854,608 Helical antenna having a solid dielectric core 125 1994
6,181,297 Antenna 98 1998
6,424,316 Helical antenna 88 2000
 
IBIDEN CO., LTD. (3)
2004/0021,475 Wafer prober 80 2003
2004/0134,899 Ceramic substrate for a semiconductor-production/inspection device 79 2003
2004/0207,072 Ceramic substrate for a semiconductor producing/examining device 83 2004
 
INTERSTITIAL, LLC (3)
5,704,355 Non-invasive system for breast cancer detection 126 1995
5,829,437 Microwave method and system to detect and locate cancers in heterogenous tissues 127 1996
6,061,589 Microwave antenna for cancer detection system 119 1997
 
LSI LOGIC CORPORATION (3)
6,927,079 Method for probing a semiconductor wafer 103 2000
6,605,951 Interconnector and method of connecting probes to a die for functional analysis 104 2000
7,023,225 Wafer-mounted micro-probing platform 93 2003
 
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. (3)
5,594,358 Radio frequency probe and probe card including a signal needle and grounding needle coupled to a microstrip transmission line 97 1994
5,794,133 Microwave mixing circuit 82 1996
6,806,836 Helical antenna apparatus provided with two helical antenna elements, and radio communication apparatus provided with same helical antenna apparatus 74 2003
 
MOTOROLA, INC. (3)
4,453,142 Microstrip to waveguide transition 107 1981
4,646,005 Signal probe 98 1984
5,748,506 Calibration technique for a network analyzer 94 1996
 
NEC CORPORATION (3)
6,310,483 Longitudinal type high frequency probe for narrow pitched electrodes 100 1998
6,281,691 Tip portion structure of high-frequency probe and method for fabrication probe tip portion composed by coaxial cable 101 1999
6,400,168 Method for fabricating probe tip portion composed by coaxial cable 101 2001
 
SARANTEL LIMITED (3)
6,184,845 Dielectric-loaded antenna 125 1997
6,369,776 Antenna 90 1999
6,914,580 Dielectrically-loaded antenna 82 2003
 
SIEMENS AKTIENGESELLSCHAFT (3)
4,275,446 Method and apparatus for measurement of attenuation and distortion by a test object 101 1979
4,805,627 Method and apparatus for identifying the distribution of the dielectric constants in an object 100 1986
5,095,891 Connecting cable for use with a pulse generator and a shock wave generator 97 1987
 
WENTWORTH LABORATORIES, INC. (3)
5,959,461 Probe station adapter for backside emission inspection 119 1997
6,031,383 Probe station for low current, low voltage parametric measurements using multiple probes 104 1998
6,124,723 Probe holder for low voltage, low current measurements in a water probe station 79 1998
 
XANDEX, INC. (3)
5,528,158 Probe card changer system and method 104 1994
5,506,498 Probe card system and method 96 1995
6,166,553 Prober-tester electrical interface for semiconductor test 98 1998
 
Aehr Test Systems (2)
6,340,895 Wafer-level burn-in and test cartridge 103 1999
6,580,283 Wafer level burn-in and test methods 87 1999
 
AMAZON.COM, INC. (2)
6,029,141 Internet-based customer referral system 1013 1997
5,960,411 Method and system for placing a purchase order via a communications network 1322 1997
 
BRUKER NANO, INC. (2)
5,376,790 Scanning probe microscope 113 1992
5,672,816 Large stage system for scanning probe microscopes and other instruments 115 1995
 
DAINIPPON SCREEN MFG. CO., LTD. (2)
4,531,474 Rotary board treating apparatus 88 1984
4,746,857 Probing apparatus for measuring electrical characteristics of semiconductor device formed on wafer 95 1986
 
Daymarc Corporation (2)
4,419,626 Broad band contactor assembly for testing integrated circuit devices 78 1981
4,473,798 Interface assembly for testing integrated circuit devices 72 1981
 
DCG SYSTEMS, INC. (2)
5,530,372 Method of probing a net of an IC at an optimal probe-point 117 1994
5,675,499 Optimal probe point placement 110 1996
 
EASTMAN KODAK COMPANY (2)
5,848,500 Light-tight enclosure and joint connectors for enclosure framework 106 1997
6,624,891 Interferometric-based external measurement system and method 49 2001
 
EATON CORPORATION (2)
4,665,360 Docking apparatus 68 1985
4,904,935 Electrical circuit board text fixture having movable platens 112 1988
 
ELK FINANCIAL, INC. (2)
6,064,217 Fine pitch contact device employing a compliant conductive polymer bump 132 1996
2002/0011,859 METHOD FOR FORMING CONDUCTIVE BUMPS FOR THE PURPOSE OF CONTRRUCTING A FINE PITCH TEST DEVICE 109 1998
 
EMIMAGING LTD (2)
5,715,819 Microwave tomographic spectroscopy system and method 103 1994
6,490,471 Electromagnetical imaging and therapeutic (EMIT) systems 87 2001
 
HAMAMATSU PHOTONICS K.K. (2)
4,922,186 Voltage detector 81 1988
5,552,716 Method of positioning an electrooptic probe of an apparatus for the measurement of voltage 51 1994
 
HITACHI, LTD. (2)
4,383,178 System for driving rotary member in vacuum 87 1981
2005/0186,696 Gas flowmeter and manufacturing method thereof 2005
 
HP HOLDINGS THREE, INC. (2)
5,336,989 AC mains test apparatus and method 48 1991
5,995,914 Method and apparatus for asynchronously measuring frequency shifted signals 101 1996
 
Hughes Aircraft Company (2)
5,512,835 Electrical probe and method for measuring gaps and other discontinuities in enclosures using electrical inductance for RF shielding assessment 73 1992
5,412,866 Method of making a cast elastomer/membrane test probe assembly 121 1993
 
HUGHES ELECTRONICS CORPORATION (2)
4,772,846 Wafer alignment and positioning apparatus for chip testing by voltage contrast electron microscopy 132 1986
5,583,445 Opto-electronic membrane probe 100 1994
 
INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE (2)
6,049,216 Contact type prober automatic alignment 92 1997
7,012,441 High conducting thin-film nanoprobe card and its fabrication method 104 2003
 
INTEGRATED TECHNOLOGY CORPORATION (2)
5,657,394 Integrated circuit probe card inspection system 91 1993
6,118,894 Integrated circuit probe card inspection system 116 1997
 
KABUSHIKI KAISHA NIHON MICRONICS (2)
5,888,075 Auxiliary apparatus for testing device 77 1997
6,019,612 Electrical connecting apparatus for electrically connecting a device to be tested 84 1998
 
KEITHLEY INSTRUMENTS, INC. (2)
6,121,783 Method and apparatus for establishing electrical contact between a wafer and a chuck 83 1997
6,104,206 Product wafer junction leakage measurement using corona and a kelvin probe 115 1997
 
KLA-TENCOR CORPORATION (2)
6,633,174 Stepper type test structures and methods for inspection of semiconductor integrated circuits 99 2000
6,771,806 Multi-pixel methods and apparatus for analysis of defect information from test structures on semiconductor devices 130 2000
 
LUCENT TECHNOLOGIES INC. (2)
5,970,429 Method and apparatus for measuring electrical noise in devices 117 1997
6,245,692 Method to selectively heat semiconductor wafers 90 1999
 
MASSACHUSETTS INSTITUTE OF TECHNOLOGY (2)
5,653,939 Optical and electrical methods and apparatus for molecule detection 434 1995
5,998,768 Active thermal control of surfaces by steering heating beam in response to sensed thermal radiation 101 1998
 
MICROWAVE IMAGING SYSTEMS TECHNOLOGIES, INC. (2)
5,841,288 Two-dimensional microwave imaging apparatus and methods 114 1997
6,448,788 Fixed array microwave imaging apparatus and method 101 2000
 
MOTOROLA MOBILITY LLC (2)
5,793,213 Method and apparatus for calibrating a network analyzer 93 1996
5,751,252 Method and antenna for providing an omnidirectional pattern 92 1997
 
NGK INSULATORS, LTD. (2)
5,280,156 Wafer heating apparatus and with ceramic substrate and dielectric layer having electrostatic chucking means 210 1991
6,001,760 Aluminum nitride sintered body, metal embedded article, electronic functional material and electrostatic chuck 115 1997
 
NIKON CORPORATION (2)
4,856,904 Wafer inspecting apparatus 114 1988
6,628,503 Gas cooled electrostatic pin chuck for vacuum applications 99 2001
 
PHASE METRICS (2)
5,517,111 Automatic testing system for magnetoresistive heads 63 1995
5,668,470 Automatic testing system for magnetoresistive heads 55 1996
 
RCA Corporation (2)
4,284,033 Means to orbit and rotate target wafers supported on planet member 115 1979
4,651,115 Waveguide-to-microstrip transition 81 1985
 
RUDOLPH TECHNOLOGIES, INC. (2)
4,918,374 Method and apparatus for inspecting integrated circuit probe cards 102 1988
6,710,798 Methods and apparatus for determining the relative positions of probe tips on a printed circuit board probe card 108 1999
 
SAMSUNG ELECTRONICS CO., LTD. (2)
6,970,001 Variable impedance test probe 73 2003
6,900,653 Needle fixture of a probe card in semiconductor inspection equipment and needle fixing method thereof 105 2003
 
Santa Barbara Research Center (2)
4,695,794 Voltage calibration in E-beam probe using optical flooding 61 1985
4,730,158 Electron-beam probing of photodiodes 78 1986
 
SEMATECH, INC. (2)
5,159,264 Pneumatic energy fluxmeter 79 1991
5,159,267 Pneumatic energy fluxmeter 81 1992
 
Semitest, Inc. (2)
4,891,584 Apparatus for making surface photovoltage measurements of a semiconductor 136 1988
5,091,691 Apparatus for making surface photovoltage measurements of a semiconductor 80 1988
 
SHARP KABUSHIKI KAISHA (2)
5,089,774 Apparatus and a method for checking a semiconductor 128 1990
5,374,938 Waveguide to microstrip conversion means in a satellite broadcasting adaptor 94 1993
 
SKYWORKS SOLUTIONS, INC. (2)
6,582,979 Structure and method for fabrication of a leadless chip carrier with embedded antenna 90 2001
6,770,955 Shielded antenna in a semiconductor package 88 2001
 
SOLID STATE MEASUREMENTS, INC. (2)
6,900,652 Flexible membrane probe and method of use thereof 105 2003
7,023,231 Work function controlled probe for measuring properties of a semiconductor wafer and method of use thereof 93 2004
 
SONY CORPORATION (2)
6,362,792 Antenna apparatus and portable radio set 77 2000
6,366,247 Antenna device and portable radio set 82 2000
 
SV PROBE PTE LTD. (2)
5,422,574 Large scale protrusion membrane for semiconductor devices under test with very high pin counts 171 1993
6,037,785 Probe card apparatus 107 1996
 
TDK CORPORATION (2)
5,510,792 Anechoic chamber and wave absorber 93 1994
7,012,425 Eddy-current probe 94 2005
 
TELEDYNE LECROY, INC. (2)
6,822,463 Active differential test probe with a transmission line input structure 75 2002
7,019,544 Transmission line input structure test probe 94 2004
 
TENCOR INSTRUMENTS (2)
4,755,746 Apparatus and methods for semiconductor wafer testing 155 1985
5,852,232 Acoustic sensor as proximity detector 124 1997
 
The Aerospace Corporation (2)
6,211,663 Baseband time-domain waveform measurement method 113 1999
6,396,298 Active feedback pulsed measurement method 89 2000
 
The United States of America as represented by the Secretary of the Navy (2)
4,479,690 Underwater splice for submarine coaxial cable 59 1982
5,091,732 Lightweight deployable antenna system 88 1990
 
TRIO-TECH INTERNATIONAL (2)
6,104,203 Test apparatus for electronic components 52 1996
6,605,955 Temperature controlled wafer chuck system with low thermal resistance 98 2000
 
WI-LAN INC. (2)
5,565,881 Balun apparatus including impedance transformer having transformation length 82 1994
5,628,057 Multi-port radio frequency signal transformation network 98 1996
 
ABBOTT DIABETES CARE INC. (1)
2005/0165,316 Method for detecting artifacts in data 76 2004
 
Acome, Societies Anonyme (1)
4,621,169 Electric cable construction and uses therefor 93 1985
 
ADE CORPORATION (1)
5,642,298 Wafer testing and self-calibration system 112 1996
 
ADVANCED MICRO DEVICES, INC. (1)
6,396,296 Method and apparatus for electrical characterization of an integrated circuit package using a vertical probe station 98 2000
 
ADVANCED RESEARCH AND APPLICATIONS CORPORATION (1)
4,575,676 Method and apparatus for radiation testing of electron devices 74 1983
 
ADVANTEST (SINGAPORE) PTE LTD (1)
6,812,718 Massively parallel interface for electronic circuits 102 2001
 
ALPS ELECTRIC CO., LTD. (1)
4,725,793 Waveguide-microstrip line converter 85 1986
 
AMP Incorporated (1)
4,777,434 Microelectronic burn-in system 87 1987
 
ANALOG DEVICES, INC. (1)
5,712,571 Apparatus and method for detecting defects arising as a result of integrated circuit processing 56 1995
 
ANDO ELECTRIC CO., LTD. (1)
2001/0054,906 Probe card and a method of manufacturing the same 77 2001
 
APEX MICROTECHNOLOGY, INC. (1)
4,871,965 Environmental testing facility for electronic components 65 1988
 
ARRAY BIOSCIENCE CORPORATION (1)
6,707,548 Systems and methods for filter based spectrographic analysis 98 2001
 
ASAHI KOGAKU KOGYO KABUSHIKI KAISHA (1)
5,267,088 Code plate mounting device 83 1990
 
AT&T Information Systems Inc. (1)
4,978,907 Apparatus and method for expanding the frequency range over which electrical signal amplitudes can be accurately measured 53 1989
 
ATG-Electronics Inc. (1)
5,198,756 Test fixture wiring integrity verification device 113 1991
 
AUTOCYTE NORTH CAROLINA, L.L.C. (1)
5,659,421 Slide positioning and holding device 105 1995
 
AVAGO TECHNOLOGIES ECBU IP (SINGAPORE) PTE. LTD. (1)
5,066,357 Method for making flexible circuit card with laser-contoured vias and machined capacitors 107 1990
 
BANK OF NEW ENGLAND, N.A., A NATIONAL BANKING ASSOCIATION (1)
4,186,338 Phase change detection method of and apparatus for current-tracing the location of faults on printed circuit boards and similar systems 82 1976
 
BARKER REVOCABLE TRUST U/A/D (1)
5,202,558 Flexible fiber optic probe for high-pressure shock experiments 102 1992
 
BECHTEL BWXT IDAHO, LLC (1)
6,147,502 Method and apparatus for measuring butterfat and protein content using microwave absorption techniques 79 1998
 
Bell Telephone Laboratories, Incorporated (1)
4,684,883 Method of manufacturing high-quality semiconductor light-emitting devices 96 1985
 
Bendix Electronics S.A. (1)
4,884,206 Process and processing circuit for the analog output signal of a sensor 54 1988
 
BERTHOLD TECHNOLOGIES GMBH & CO. KG (1)
5,369,368 Device for determining material parameters by means of microwave measurements 79 1993
 
Biotronic Systems Corporation (1)
5,082,627 Three dimensional binding site array for interfering with an electrical field 85 1987
 
BLACKBERRY LIMITED (1)
6,794,950 Waveguide to microstrip transition 85 2001
 
BOARD OF REGENTS OF THE UNIVERSITY OF WISCONSIN SYSTEM, THE, AN INSTITUTE OF WI (1)
5,233,306 Method and apparatus for measuring the permittivity of materials 119 1991
 
BOARD OF REGENTS, THE UNIVERSITY OF TEXAS SYSTEM (1)
2003/0119,057 Forming and modifying dielectrically-engineered microparticles 106 2001
 
BROADCOM CORPORATION (1)
7,088,981 Apparatus for reducing flicker noise in a mixer circuit 97 2001
 
BROOKS AUTOMATION, INC. (1)
5,539,323 Sensor for articles such as wafers on end effector 119 1993
 
CARDIFF AND VALE NHS TRUST (1)
2004/0175,294 Apparatus and method for analysing a biological sample in response to microwave radiation 74 2004
 
Carl-Zeiss-Stiftung (1)
4,515,439 Attachment of microscope objectives 78 1982
 
CEPROBE CORPORATION, A DE CORP. (1)
5,382,898 High density probe card for testing electrical circuits 102 1992
 
CERPROBE CORPORATION (1)
6,002,426 Inverted alignment station and method for calibrating needles of probe card for probe testing of integrated circuits 109 1997
 
Charmilles Technologies S.A. (1)
4,918,279 EDM cutting machine including device for preventing transmission of sealing plate movement to guide head arm 60 1988
 
CHENG, DAVID (1)
5,479,108 Method and apparatus for handling wafers 157 1992
 
CIRREX SYSTEMS LLC (1)
6,222,970 Methods and apparatus for filtering an optical fiber 135 1999
 
COMPAQ COMPUTER CORPORATION (1)
5,500,606 Completely wireless dual-access test fixture 113 1993
 
COMSAT CORPORATION (1)
4,365,195 Coplanar waveguide mounting structure and test fixture for microwave integrated circuits 69 1979
 
Contraves AG (1)
4,567,908 Discharge system and method of operating same 50 1984
 
CORNELL UNIVERSITY (1)
4,680,538 Millimeter wave vector network analyzer 72 1985
 
CREDENCE SYSTEMS CORPORATION (1)
5,883,523 Coherent switching power for an analog circuit tester 103 1997
 
CROWN PRODUCTS, INC. (1)
7,019,541 Electric conductivity water probe 96 2004
 
CSI TECHNOLOGY, INC. (1)
6,091,236 System and method for measuring and analyzing electrical signals on the shaft of a machine 94 1997
 
D-LINK CORPORATION (1)
6,778,140 Atch horn antenna of dual frequency 72 2003
 
Data Probe Corporation (1)
4,588,950 Test system for VLSI digital circuit and method of testing 94 1983
 
DEBIOTECH S.A. (1)
7,005,078 Micromachined fluidic device and method for making same 142 2001
 
DELPHI TECHNOLOGIES, INC. (1)
7,015,709 Ultra-broadband differential voltage probes 100 2004
 
DELTA DESIGN, INC. (1)
6,549,026 Apparatus and method for temperature control of IC device during test 68 2000
 
DESIGNTECH INTERNATIONAL, INC. (1)
5,041,782 Microstrip probe 95 1989
 
DH TECHNOLOGIES DEVELOPMENT PTE. LTD. (1)
6,627,461 Method and apparatus for detection of molecular events using temperature control of detection environment 90 2001
 
Digital Test Corporation (1)
5,773,951 Wafer prober having sub-micron alignment accuracy 58 1996
 
Dimension Polyant Sailcloth, Inc. (1)
6,013,586 Tent material product and method of making tent material product 90 1997
 
DIT-MCO INTERNATIONAL CORPORATION (1)
4,357,575 Apparatus for use in testing printed circuit process boards having means for positioning such boards in proper juxtaposition with electrical contacting assemblies 115 1980
 
DRANETZ TECHNOLOGIES, INC., (1)
4,414,638 Sampling network analyzer with stored correction of gain errors 74 1981
 
DYNEX SEMICONDUCTOR LIMITED (1)
6,265,950 Transition from a waveguide to a strip transmission line 88 1999
 
EADS DEUTSCHLAND GMBH (1)
6,636,182 Structural antenna for flight aggregates or aircraft 73 2001
 
EAST GIANT LIMITED (1)
5,879,289 Hand-held portable endoscopic camera 149 1996
 
EDO CORPORATION, BARNES DIVISION (1)
4,755,874 Emission microscopy system 158 1987
 
EJ Systems, Inc. (1)
5,164,661 Thermal control system for a semi-conductor burn-in 93 1991
 
Electric Power Research Institute, Inc. (1)
4,487,996 Shielded electrical cable 104 1982
 
ELECTRO SCIENTIFIC INDUSTRIES, INC. (1)
6,100,815 Compound switching matrix for probing and interconnecting devices under test to measurement equipment 98 1997
 
ELECTRONICS RESEARCH, INC. (1)
2004/0100,276 Method and apparatus for calibration of a vector network analyzer 99 2002
 
ENDEVCO CORPORATION (1)
5,214,243 High-temperature, low-noise coaxial cable assembly with high strength reinforcement braid 124 1991
 
ENDWAVE CORPORATION (1)
6,023,209 Coplanar microwave circuit having suppression of undesired modes 73 1996
 
ERS ELECTRONIC GMBH (1)
2005/0227,503 Method and device for conditioning semiconductor wafers and/or hybrids 46 2005
 
ETS Gourdon (1)
5,034,688 Temperature conditioning support for small objects such as semi-conductor components and thermal regulation process using said support 137 1989
 
EUROPAISCHES LABORATORIUM FUR MOLEKULARBIOLOGIE (EMBL) (1)
6,798,226 Multiple local probe measuring device and method 91 2002
 
EUROPEAN ELECTRONIC TEST CENTRE (1)
5,006,796 Temperature control instrument for electronic components under test 85 1988
 
EVERETT CHARLES TECHNOLOGIES, INC. (1)
5,214,374 Dual level test fixture 102 1991
 
FAIRCHILD SEMICONDUCTOR CORPORATION (1)
5,357,211 Pin driver amplifier 82 1993
 
FILOTEX (1)
5,397,855 Low noise cable 93 1993
 
FLUKE CORPORATION (1)
6,384,614 Single tip Kelvin probe 101 2000
 
FM INDUSTRIES, INC. (1)
5,572,398 Tri-polar electrostatic chuck 80 1994
 
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V. (1)
6,653,903 Supply voltage decoupling device for HF amplifier circuits 72 2001
 
FTS SYSTEMS, INC. (1)
4,787,752 Live component temperature conditioning device providing fast temperature variations 81 1986
 
FUJIKURA LTD. (1)
4,626,618 DC electric power cable 98 1985
 
Fujikura Rubber Works, Ltd. (1)
4,425,395 Base fabrics for polyurethane-coated fabrics, polyurethane-coated fabrics and processes for their production 104 1982
 
FUJITSU LIMITED (1)
7,023,229 Dynamic burn-in equipment 51 2004
 
GATAN, INC. (1)
6,914,244 Ion beam milling system and method for electron microscopy specimen preparation 85 2004
 
GCB INDUSTRIES, INC. (1)
6,229,327 Broadband impedance matching probe 103 1997
 
GE CAPITAL EQUITY INVESTMENTS, INC. (1)
6,628,980 Apparatus, systems, and methods for in vivo magnetic resonance imaging 143 2001
 
Gebr. Marzhauser Wetzlar oHG (1)
4,552,033 Drive system for a microscope stage or the like 109 1984
 
General Dielectric, Inc. (1)
2002/0050,828 Multi-feed microwave reflective resonant sensors 78 2001
 
GENERAL ELECTRIC COMPANY (1)
7,015,690 Omnidirectional eddy current probe and inspection system 98 2004
 
GENERAL ELECTRIC MEDICAL SYSTEMS ISRAEL LTD., AN ISRAEL CORPORATION AFFILIATED WITH GENERAL ELECTRIC COMPANY (1)
4,691,163 Dual frequency surface probes 114 1985
 
GENERAL MOTORS CORPORATION (1)
4,277,741 Microwave acoustic spectrometer 82 1979
 
GENERAL SIGNAL CORPORATION (1)
4,557,599 Calibration and alignment target plate 81 1984
 
GENETRONICS, INC. (1)
5,869,326 Electroporation employing user-configured pulsing scheme 117 1996
 
GENRAD, INC. (1)
5,861,743 Hybrid scanner for use in an improved MDA tester 49 1995
 
GEO INTERNATIONAL CORPORATION (1)
4,675,600 Testing apparatus for plated through-holes on printed circuit boards, and probe therefor 65 1984
 
GILBOE, DEREK (1)
7,034,553 Direct resistance measurement corrosion probe 95 2003
 
GILLESPIE, ROBB S. (1)
6,481,939 Tool tip conductivity contact sensor and method 87 2001
 
GTE Valeron Corporation (1)
4,401,945 Apparatus for detecting the position of a probe relative to a workpiece 96 1981
 
GYRUS MEDICAL LIMITED (1)
6,409,724 Electrosurgical instrument 148 2000
 
H+W Test Products, Inc. (1)
6,054,869 Bi-level test fixture for testing printed circuit boards 95 1998
 
HEIDELBERGER DRUCKMASCHINEN AG (1)
4,856,426 Sheet-fed rotary printing machine with printing units arranged in tandem 55 1985
 
HERSTEIN, DOV (1)
4,810,981 Assembly of microwave components 89 1987
 
HEWLETT-PACKARD COMPANY (1)
4,795,962 Floating driver circuit and a device for measuring impedances of electrical components 94 1987
 
HITACHI SOFTWARE ENGINEERING CO., LTD. (1)
7,035,738 Probe designing apparatus and probe designing method 93 2002
 
HITACHI ULSI SYSTEMS CO., LTD. (1)
6,734,687 Apparatus for detecting defect in device and method of detecting defect 108 2001
 
Honeywell Inc. (1)
6,232,790 Method and apparatus for amplifying electrical test signals from a micromechanical device 63 1999
 
Honeywell Information Systems Inc. (1)
4,342,958 Automatic test equipment test probe contact isolation detection method 70 1980
 
HOUSTON ADVANCED RESEARCH CENTER, A CORP. OF TX (1)
5,846,708 Optical and electrical methods and apparatus for molecule detection 341 1992
 
HYDRO-QUEBEC (1)
5,105,181 Method and electrical measuring apparatus for analyzing the impedance of the source of an actual alternating voltage 55 1990
 
HYNIX SEMICONDUCTOR INC. (1)
7,002,364 Semiconductor device for reducing the number of probing pad used during wafer test and method for testing the same 95 2003
 
Hypervision, Inc. (1)
5,475,316 Transportable image emission microscope 134 1993
 
HYPRES, INC. (1)
4,894,612 Soft probe for providing high speed on-wafer connections to a circuit 155 1988
 
Ignite Sales, Inc. (1)
6,236,975 System and method for profiling customers for targeted marketing 443 1998
 
INIZIATIVE MARITTIME 1991 S.R.L. (1)
5,245,292 Method and apparatus for sensing a fluid handling 74 1992
 
INTEGRAL TECHNOLOGIES, INC. (1)
7,006,046 Low cost electronic probe devices manufactured from conductive loaded resin-based materials 94 2004
 
INTEGRATED PROCESS EQUIPMENT CORP. (1)
5,515,167 Transparent optical chuck incorporating optical monitoring 140 1994
 
INTELLECTUAL VENTURES I LLC (1)
5,633,780 Electrostatic discharge protection device 125 1996
 
INTERMEC IP CORP. (1)
6,236,223 Method and apparatus for wireless radio frequency testing of RFID integrated circuits 161 1999
 
INTERSIL CORPORATION (1)
4,528,504 Pulsed linear integrated circuit tester 96 1982
 
INTEST CORPORATION (1)
5,900,737 Method and apparatus for automated docking of a test head to a device handler 115 1996
 
INTEST IP CORPORATION (1)
4,705,447 Electronic test head positioner for test systems 130 1985
 
ITT CORPORATION (1)
5,105,148 Replaceable tip test probe 58 1991
 
J.A. WOOLLAM CO., INC. (1)
6,937,341 System and method enabling simultaneous investigation of sample with two beams of electromagnetic radiation 82 2002
 
JPK INSTRUMENTS AG (1)
7,022,985 Apparatus and method for a scanning probe microscope 98 2002
 
Junkosha Co., Ltd. (1)
4,567,321 Flexible flat cable 101 1984
 
KABUSHIKI KAISHA TOSHIBA (1)
7,032,307 Method for fabricating a probe pin for testing electrical characteristics of an apparatus 92 2004
 
KAI TECHNOLOGIES, INC. (1)
6,275,738 Microwave devices for medical hyperthermia, thermotherapy and diagnosis 126 1999
 
KDC TECHNOLOGY CORP. (1)
5,227,730 Microwave needle dielectric sensors 98 1992
 
KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY (1)
6,528,993 Magneto-optical microscope magnetometer 79 2000
 
Kraftwerk Union Aktiengesellschaft (1)
4,642,417 Concentric three-conductor cable 113 1985
 
KYOCERA CORPORATION (1)
6,987,483 Effectively balanced dipole microstrip antenna 79 2003
 
L&P PROPERTY MANAGEMENT COMPANY (1)
5,505,150 Method and apparatus for facilitating loop take time adjustment in multi-needle quilting machine 86 1994
 
LAM RESEARCH CORPORATION (1)
7,015,703 Radio frequency Langmuir probe 96 2004
 
LOCKHEED MARTIN CORPORATION (1)
4,853,613 Calibration method for apparatus evaluating microwave/millimeter wave circuits 65 1987
 
M/A-COM TECHNOLOGY SOLUTIONS HOLDINGS, INC. (1)
5,142,224 Non-destructive semiconductor wafer probing system using laser pulses to generate and detect millimeter wave signals 102 1991
 
M/A-COM, INC. (1)
4,376,920 Shielded radio frequency transmission cable 140 1981
 
MAGMA DESIGN AUTOMATION, INC. (1)
5,030,907 CAD driven microprobe integrated circuit tester 112 1989
 
MARTIN MARIETTA CORPORATION (1)
5,867,073 Waveguide to transmission line transition 83 1994
 
MATTSON TECHNOLOGY, INC. (1)
6,172,337 System and method for thermal processing of a semiconductor substrate 102 1999
 
MAX-PLANCK-INSTITUT FUER EISENFORSCHUNG GMBH (1)
5,369,370 Method and apparatus for the measurement of the corrosion potential between a coated metal surface and a reference electrode 70 1992
 
MCC GESELLSCHAFT FUR DIAGNOSESYSTEME IN MEDIZIN UND TECHNIK MBH & CO. KG (1)
2005/0168,722 Device and method for measuring constituents in blood 23 2003
 
MEASUREMENT SYSTEMS, INC. (1)
5,646,538 Method and apparatus for fastener hole inspection with a capacitive probe 52 1995
 
MEDICAL COLLEGE OF GEORGIA RESEARCH INSTITUTE, INC. (1)
5,488,954 Ultrasonic transducer and method for using same 136 1994
 
MEDICAL DEVICE INNOVATIONS LIMITED (1)
2006/0155,270 Tissue ablation apparatus and method of ablating tissue 110 2003
 
MEDISPECTRA, INC. (1)
2004/0186,382 Spectral volume microprobe arrays 76 2003
 
MEDXENSE AS (1)
7,003,184 Fiber optic probes 104 2001
 
MERCK & CO., INC. (1)
7,013,221 Iterative probe design and detailed expression profiling with flexible in-situ synthesis arrays 94 2000
 
MICROCRAFT (1)
7,188,037 Method and apparatus for testing circuit boards 79 2004
 
MILLER DESIGN AND EQUIPMENT INC. (1)
5,303,938 Kelvin chuck apparatus and method of manufacture 59 1993
 
MITEL CORPORATION (1)
5,508,631 Semiconductor test chip with on wafer switching matrix 54 1994
 
MITSUBISHI GAS CHEMICAL COMPANY, INC. (1)
6,222,031 Process for preparing water-soluble tricarboxypolysaccharide 82 1998
 
MOLECULAR DEVICES, INC. (1)
5,164,319 Multiple chemically modulated capacitance determination 297 1989
 
MTU MOTOREN- UND TURBINEN-UNION MUENCHEN GMBH (1)
5,232,789 Structural component with a protective coating having a nickel or cobalt basis and method for making such a coating 90 1992
 
MURATA MANUFACTURING CO., LTD. (1)
6,838,885 Method of correcting measurement error and electronic component characteristic measurement apparatus 99 2003
 
NANOMETRICS INCORPORATED (1)
4,818,169 Automated wafer inspection system 134 1985
 
NATIONAL METAL REFINING COMPANY (1)
4,566,184 Process for making a probe for high speed integrated circuits 100 1984
 
Nebraska Electronics, Inc. (1)
5,481,196 Process and apparatus for microwave diagnostics and therapy 84 1994
 
NEC ELECTRONICS CORPORATION (1)
6,320,396 Parasitic MIM structural spot analysis method for semiconductor device and parasitic MIM structure spot analysis method for silicon semiconductor device 98 1997
 
NEWPORT FAB, LLC (1)
6,727,716 Probe card and probe needle for high frequency testing 95 2002
 
NORTEL NETWORKS LIMITED (1)
4,853,624 Tunable microwave wafer probe 92 1988
 
NORTHROP GRUMMAN CORPORATION (1)
2005/0026,276 Remote detection and analysis of chemical and biological aerosols 79 2003
 
NORTHROP GRUMMAN SYSTEMS CORPORATION (1)
5,479,109 Testing device for integrated circuits on wafer 117 1994
 
NXP B.V. (1)
5,491,426 Adaptable wafer probe assembly for testing ICs with different power/ground bond pad configurations 78 1994
 
OMNIPROBE, INC. (1)
6,420,722 Method for sample separation and lift-out with one cut 117 2001
 
OPTOMETRIX, INC. (1)
6,181,416 Schlieren method for imaging semiconductor device properties 82 1999
 
ORGANISATION EUROPEENNE POUR LA RECHERCHE NUCLEAIRE (1)
4,933,634 Device and method to measure a short radiation pulse or an electric pulse 63 1989
 
OXFORD INSTRUMENTS AMERICA, INC. (1)
5,448,172 Triboelectric instrument with DC drift compensation 40 1993
 
PARKER INTANGIBLES LLC (1)
4,771,846 Apparatus for establishing steering feel 45 1986
 
PICO TECHNOLOGY HOLDINGS, INC. (1)
6,335,625 Programmable active microwave ultrafine resonance spectrometer (PAMURS) method and systems 85 2000
 
PINNACLE PRODUCTS, INC. (1)
5,807,107 Dental infection control system 91 1996
 
POPKIN FAMILY ASSETS, L.L.C. (1)
6,418,009 Broadband multi-layer capacitor 86 2000
 
PRECISION DIVERSIFIED INDUSTRIES, INC. (1)
4,694,245 Vacuum-actuated top access test probe fixture 75 1984
 
PROFILE TECHNOLOGIES, INC. (1)
2001/0044,152 Dual beam, pulse propagation analyzer, medical profiler interferometer 72 2001
 
PURDUE RESEARCH FOUNDATION (1)
2004/0147,034 Method and apparatus for measuring a substance in a biological sample 126 2003
 
QUALCOMM INCORPORATED (1)
6,737,920 Variable gain amplifier 76 2002
 
REAL LIVING, INC. (1)
6,236,977 Computer implemented marketing system 485 1999
 
RELIABILITY INCORPORATED (1)
2002/0070,745 Cooling system for burn-in unit 83 2000
 
RENISHAW PLC (1)
5,270,664 Probe for measuring surface roughness by sensing fringe field capacitance effects 123 1992
 
RESEARCH IN MOTION LIMITED (1)
5,949,383 Compact antenna structures including baluns 113 1997
 
ROBERT BOSCH GMBH (1)
6,066,911 Ultrasonic driving element 123 1998
 
ROCKSTAR CONSORTIUM US LP (1)
6,753,679 Test point monitor using embedded passive resistance 83 2002
 
ROSEMOUNT TANK RADAR AB (1)
6,278,411 Horn antenna 78 1999
 
ROSENBERGER HOCHFREQUENZTECHNIK GMBH & CO. KG (1)
2004/0066,181 High-frequency probe tip 80 2003
 
RYODEN SEMICONDUCTOR SYSTEM ENGINEERING CORPORATION (1)
6,194,907 Prober and electric evaluation method of semiconductor device 60 1999
 
SAE MAGNETICS (H.K.) LTD. (1)
7,015,689 Connection method for probe pins for measurement of characteristics of thin-film magnetic head and characteristic measurement method for thin-film magnetic head 94 2003
 
SAMSUNG AEROSPACE INDUSTRIES, LTD. (1)
5,857,667 Vacuum chuck 67 1996
 
SANDIA CORPORATION (1)
6,078,183 Thermally-induced voltage alteration for integrated circuit analysis 129 1998
 
SANTRONICS, INC. (1)
7,030,599 Hand held voltage detection probe 100 2004
 
SARNOFF CORPORATION (1)
5,993,611 Capacitive denaturation of nucleic acid 115 1997
 
SCHLUMBERGER SYSTEMS AND SERVICES, INC. (1)
4,352,061 Universal test fixture employing interchangeable wired personalizers 108 1979
 
SCHLUMBERGER TECHNOLOGY CORPORATION (1)
4,766,384 Well logging apparatus for determining dip, azimuth, and invaded zone conductivity 100 1986
 
SCIENCE & TECHNOLOGY CORPORATION @ UNM (1)
6,549,022 Apparatus and method for analyzing functional failures in integrated circuits 125 2000
 
SEIKO INSTRUMENTS INC. (1)
7,015,455 Near-field optical probe 92 2005
 
SEMICOA CORPORATION (1)
5,798,652 Method of batch testing surface mount devices using a substrate edge connector 77 1996
 
SEMICONDUCTOR DIAGNOSTICS, INC. (1)
6,114,865 Device for electrically contacting a floating semiconductor wafer having an insulating film 111 1999
 
SEMICONDUCTOR PHYSICS LABORATORY, INC. (1)
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SENSOR DIAGNOSTICS, INC. (1)
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SIERRA MONOLITHICS, INC. (1)
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Signatone Corporation (1)
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SILICON GRAPHICS, INC. (1)
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Sirotech Ltd. (1)
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ST. CLAIR INTELLECTUAL PROPERTY CONSULTANTS, INC. (1)
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THERMOCARBON, INC. (1)
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THK CO., LTD. (1)
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THOMAS JEFFERSON UNIVERSITY (1)
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Thomson-CSF (1)
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Tovex Tech, Inc. (1)
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UNIVERSITY OF MARYLAND, BALTIMORE (1)
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Yamaichi Denki Kogyo Kabushiki Kaisha (1)
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Other [Check patent profile for assignment information] (32)
4,330,783 Coaxially fed dipole antenna 77 1979
4,284,682 Heat sealable, flame and abrasion resistant coated fabric 123 1980
4,383,217 Collinear four-point probe head and mount for resistivity measurements 86 1981
4,480,223 Unitary probe assembly 133 1981
4,641,659 Medical diagnostic microwave scanning apparatus 107 1982
4,515,133 Fuel economizing device 76 1984
4,812,754 Circuit board interfacing apparatus 116 1987
4,711,563 Portable collapsible darkroom 89 1987
4,731,577 Coaxial probe card 117 1987
4,791,363 Ceramic microstrip probe blade 136 1987
5,363,050 Quantitative dielectric imaging system 105 1990
5,371,457 Method and apparatus to test for current in an integrated circuit 94 1991
5,209,088 Changeable code lock 63 1991
5,414,565 Tilting kinematic mount 84 1991
5,187,443 Microwave test fixtures for determining the dielectric properties of a material 79 1992
5,220,277 Arrangement for testing semiconductor wafers or the like 102 1992
5,584,608 Anchored cable sling system 85 1994
5,670,322 Multi site molecule detection method 171 1995
5,670,888 Method for transporting and testing wafers 126 1995
5,744,971 Device and apparatus for measuring dielectric properties of materials 89 1995
5,831,442 Handling device 95 1996
5,675,932 Plant growing system 90 1996
5,949,579 Flexible darkness adapting viewer 88 1997
6,147,851 Method for guarding electrical regions having potential gradients 91 1999
6,327,034 Apparatus for aligning two objects 92 1999
6,548,311 Device and method for detecting analytes 110 2000
2001/0002,794 Split resistor probe and method 78 2001
6,587,327 Integrated broadband ceramic capacitor array 107 2002
2003/0139,662 Method and apparatus for detecting, identifying and performing operations on microstructures including, anthrax spores, brain cells, cancer cells, living tissue cells, and macro-objects including stereotactic neurosurgery instruments, weapons and explosives 82 2002
7,015,707 Micro probe 110 2003
2004/0193,382 Method and apparatus for calibrating a multiport test system for measurement of a DUT 96 2004
2006/0114,012 Method and apparatus for testing semiconductor wafers by means of a probe card 47 2005

Patent Citation Ranking

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Patent Info (Count) # Cites Year
 
CASCADE MICROTECH, INC. (2)
7,969,173 Chuck for holding a device under test 1 2007
8,319,503 Test apparatus for measuring a characteristic of a device under test 0 2009
 
Circuit Check, Inc. (1)
8,754,665 Dual stage vacuum chamber with full circuit board support 0 2012
 
SIGNATURE CONTROL SYSTEMS, INC. (1)
8,104,190 Wood kiln moisture measurement calibration and metering methods 1 2010

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