Methods and apparatus for reducing error in interferometric imaging measurements
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United States of America Patent
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Mar 25, 2008
Grant Date -
May 17, 2007
app pub date -
Jan 11, 2007
filing date -
Jun 18, 2003
priority date (Note) -
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Abstract
Described is a fringe generator for an interferometric measurement system having improved fringe stability and reproducibility. The fringe generator includes a light source at a characteristic wavelength and a diffractive element to generate a pair of diffracted beams from light received from the light source. The fringe generator also includes a lens to receive the pair of diffracted beams and to image the plane of the diffractive element onto an object to be measured. The generated fringe pattern is substantially independent to a change in the position of the light source relative to the lens and a change in the characteristic wavelength of the light source. A broadband light source can be used and the resulting broadband fringe pattern is substantially independent to a change in the position of the light source relative to the lens and to a change in the spectral distribution of the broadband light source.
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