Meniscus proximity system for cleaning semiconductor substrate surfaces
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United States of America Patent
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Apr 1, 2008
Grant Date -
May 17, 2007
app pub date -
Jan 3, 2007
filing date -
Sep 30, 2002
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A system and apparatus for cleaning a substrate is provided. The system includes a first head configured as a bar shape that extends approximately a diameter of the substrate. The first head is configured for placement on a first side of the substrate. A second head is also provided, and is configured as a bar shape that extends approximately the diameter of the wafer, and the second head is configured for placement on a second side of the substrate, such that the second side is opposite the first side. In this example, each of the first head and the second head have conduits formed therein along the diameter of the substrate for delivering and removing fluids so that a meniscus is capable of being contained between each of the first head and a substrate surface of the first side of the substrate and the second head and a substrate surface of the second side of the substrate.
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