Charged-particle beam instrument and method of detection
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United States of America Patent
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Apr 1, 2008
Grant Date -
Jan 25, 2007
app pub date -
Jun 30, 2006
filing date -
Jul 1, 2005
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A charged-particle beam instrument and method are offered which can inspect side and rear surfaces of the outer periphery of a specimen. The instrument has a source of the charged-particle beam and an objective lens for focusing the beam onto the specimen positioned inside a specimen chamber. The instrument further includes an electrostatic electrode and a deflection voltage power supply for applying a deflection voltage to the electrostatic electrode located on a downstream side of the objective lens. The electrostatic electrode reflects or deflects the beam passed through the objective lens such that the beam is directed at the specimen.
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