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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
CARL ZEISS SMT AG	RUDOLF-EBER-STRASSE 2 OBERKOCHEN 73447

International Classification(s)

• G02B:OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS

• [Classification Symbol]

• [Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Dornheim, Stefan	Heidenheim, DE	4	43
Faltus, Jurgen	Aalen, DE	1	36
Heisler, Andreas	Steinheim, DE	8	58
Holderer, Hubert	Konigsbronn, DE	72	1034
Mann, Heinz	Aalen, DE	3	52
Melzer, Frank	Utzmemmingen, DE	28	380
Seifert, Andreas	Aalen, DE	32	164
Singer, Wolfgang	Aalen, DE	152	2138
Warm, Berndt	Schwaig, DE	22	229
Weiss, Markus	Aalen, DE	47	490

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
April 08, 2008	US,7354168,B2   US7354168B2	GRANTED PATENT AS SECOND PUBLICATION
February 10, 2005	US,20050030653,A1   US20050030653A1	FIRST PUBLISHED PATENT APPLICATION

Full Text

US Patent No: 7354168

Facet mirror having a number of mirror facets

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