Charged particle beam device with cleaning unit and method of operation thereof
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United States of America Patent
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Apr 8, 2008
Grant Date -
Oct 19, 2006
app pub date -
Mar 3, 2004
filing date -
Mar 3, 2003
priority date (Note) -
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status (Latency Note)
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Abstract
The invention provides a charged particle beam device, an emitter module for emitting charged particle beams and a method of operation thereof. Thereby, a charged particle beam emitter (15) emitting charged particles along an optical axis (1) is realized. On the same carrier body (32), a cleaning emitter (16) for emitting charged particles approximately along the optical axis (1) is realized. Thus, an improved cleaning can be provided.
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