Shield plate for limiting cross coupling between floating gates
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United States of America Patent
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Apr 8, 2008
Grant Date -
Aug 18, 2005
app pub date -
Feb 13, 2004
filing date -
Feb 13, 2004
priority date (Note) -
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Abstract
A memory system is disclosed that includes a set of non-volatile storage elements. Each of said non-volatile storage elements includes source/drain regions at opposite sides of a channel in a substrate and a floating gate stack above the channel. The memory system also includes a set of shield plates positioned between adjacent floating gate stacks and electrically connected to the source/drain regions for reducing coupling between adjacent floating gates. The shield plates are selectively grown on the active areas of the memory without being grown on the inactive areas. In one embodiment, the shield plates are epitaxially grown silicon positioned above the source/drain regions.
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