Cluster tool architecture for processing a substrate
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United States of America Patent
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Apr 15, 2008
Grant Date -
Jun 22, 2006
app pub date -
Apr 22, 2005
filing date -
Dec 22, 2004
priority date (Note) -
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status (Latency Note)
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Abstract
A cluster tool for processing a substrate includes a cassette and a processing module including a first processing chamber that is configured to perform a chill process on a substrate, a second processing chamber that is configured to perform a bake process on the substrate, and an input chamber. The first processing chamber, the second processing chamber, and the input chamber are substantially adjacent to each other. The processing module also includes a robot that is configured to receive the substrate in the input chamber and transfer and position the substrate in the first processing chamber and second processing chamber. The robot includes a robot blade, an actuator, and a heat exchanging device. The heat exchanging device includes a chilled transfer arm assembly. The cluster tool also includes a 6-axis articulated robot configured to transfer the substrate between the cassette and the input chamber.
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