Piezoelectric actuator, method for manufacturing piezoelectric actuator, and liquid transporting apparatus
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United States of America Patent
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Apr 15, 2008
Grant Date -
May 18, 2006
app pub date -
Nov 14, 2005
filing date -
Nov 12, 2004
priority date (Note) -
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Abstract
A piezoelectric actuator includes a supporting member in which pressure chambers are formed, a vibration plate which is joined to a joining section of the supporting member, a piezoelectric layer formed on the vibration plate, and an FPC provided on the piezoelectric layer. A contact section of an electrode formed on the piezoelectric layer and a terminal section of the FPC are electrically connected via a bump formed on the terminal section. A recess is formed on an upper surface of the supporting member right below the bump. While joining the piezoelectric layer and a wire member, any damage of the piezoelectric layer and any poor connection do not occur.
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