Analog MEMS with non-linear support
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United States of America Patent
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Apr 15, 2008
Grant Date -
Oct 11, 2007
app pub date -
Mar 31, 2006
filing date -
Mar 31, 2006
priority date (Note) -
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Abstract
The disclosed embodiments reveal an analog MEMS device with a pivotal micromirror that is supported by one or more beams that provide non-linear resistance. An electrode can electrostatically attract the micromirror, while the beam(s) provide resistance to deflection. When the forces equalize, the micromirror is held at a target angle. The beam support disclosed in the embodiments is superior to conventional torsion hinge supports, because it provides non-linear support for the micromirror, better matching the non-linear nature of the electrostatic force.
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