Chuck with integrated wafer support

United States of America Patent

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Apr 22, 2008
Grant Date
May 24, 2007
app pub date
Jan 19, 2007
filing date
Dec 24, 2003

priority date (Note)
Expired

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Abstract

An improved chuck assembly with lift pins. The chuck assembly may have an outer periphery and an upper surface. The lift pins may be positioned within the periphery of the chuck assembly and may be capable of relative vertical movement with respect to the upper surface of the chuck assembly.

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Patent Owner(s)

Patent Owner	Address
CASCADE MICROTECH INC	2430 NW 206TH AVENUE BEAVERTON OR 97006

International Classification(s)

G01R:MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC V....

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Inventor Name	Address	# of filed Patents	Total Citations
Andrews, Peter	Beaverton, OR	94	2691
Dunklee, John	Tigard, OR	36	578
Froemke, Brad	Portland, OR	6	174

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Chuck with integrated wafer support

Number of patents in Portfolio can not be more than 2000

United States of America Patent

11655605

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PATENT NO	7362115
APP PUB NO	20070115013A1
SERIAL NO	11655605
DOCKET NO

US Family Size	Non-US Coverage
Patent Longevity Expired	Forward Citations

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
April 22, 2008	US,7362115,B2 US7362115B2	GRANTED PATENT AS SECOND PUBLICATION
May 24, 2007	US,20070115013,A1 US20070115013A1	FIRST PUBLISHED PATENT APPLICATION

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11655605

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