Internal member for plasma-treating vessel and method of producing the same
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United States of America Patent
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Apr 29, 2008
Grant Date -
Jul 7, 2005
app pub date -
Mar 7, 2005
filing date -
Dec 10, 1999
priority date (Note) -
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status (Latency Note)
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Abstract
It is to propose an internal member for a plasma treating vessel having excellent resistances to chemical corrosion and plasma erosion under an environment containing a halogen gas and an advantageous method of producing the same, which is a member formed by covering a surface of a substrate with a multilayer composite layer consisting of a metal coating formed as an undercoat, Al.sub.2O.sub.3 film formed on the undercoat as a middle layer and Y.sub.2O.sub.3 sprayed coating formed on the middle layer as a top coat.
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