US Patent No: 7,368,227
Number of patents in Portfolio can not be more than 2000
Method to print photoresist lines with negative sidewalls
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May 6, 2008
Issued date -
Oct 27, 2006
filing date -
11/588,574
serial no -
In Force
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Abstract
It is very difficult to produce a negative wall angle from either negative or positive-tone chemically amplified resists, especially by e-beam lithography. This problem has now been overcome by first forming a photoresist pedestal in the conventional way, followed by flood exposing with electrons. Then, a second development treatment is given. This results in removal of additional material from the sidewalls, said removal being greatest at the substrate and least at the pedestal's top surface, resulting in negatively sloping sidewalls. Application of this method to a process for forming a pole tip for a vertical magnetic writer is also discussed.
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First Claim
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International Classification(s)
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Cited Art
| Patent Info | (Count) | # Cites | Year |
|---|---|---|---|
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| 5,408,373 Integrated transducer-suspension assembly for vertical recording | 56 | 1993 | |
| 5,649,351 Method of making thin film magnetic write head | 91 | 1995 | |
| 2004/0223,258 Method and apparatus for providing a truncated profile probe for perpendicular recording | 8 | 2003 | |
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| 7,132,221 Method to print photoresist lines with negative sidewalls | 4 | 2003 | |
| 2006/0044,677 Pole width control on plated bevel main pole design of a perpendicular magnetic recording head | 17 | 2004 | |
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| 4,238,559 Two layer resist system | 16 | 1978 | |
| 5,452,164 Thin film magnetic write head | 146 | 1994 | |
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| 6,255,035 Method of creating optimal photoresist structures used in the manufacture of metal T-gates for high-speed semiconductor devices | 34 | 1999 | |
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| 5,310,626 Method for forming a patterned layer using dielectric materials as a light-sensitive material | 29 | 1993 | |
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| 6,510,024 Magnetic head and method of manufacturing the same | 15 | 2001 | |
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| 6,710,973 Single pole type recording head including tapered edges | 52 | 2001 | |
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| 4,656,546 Vertical magnetic recording arrangement | 141 | 1985 | |
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| 6,504,675 Perpendicular magnetic recording heads with write pole shaped to reduce skew effects during writing | 127 | 2001 | |
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| 4,672,493 Thin-film magnetic head with a double gap for a recording medium to be magnetized vertically | 78 | 1985 | |
Patent Citation Ranking
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
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| 7.5 Year Payment | $3600.00 | $1800.00 | $900.00 | Nov 6, 2015 |
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