Substrate handling system
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United States of America Patent
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-
May 13, 2008
Grant Date -
Jan 6, 2005
app pub date -
May 3, 2004
filing date -
May 29, 2003
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A substrate handling system and method in which an air chuck produces a film of air between the substrate and the air chuck, a magnetic chuck attracts the substrate to the air chuck, and an actuator subsystem moves the magnetic chuck closer to and away from the air chuck to alternately pick up a substrate and release the substrate.
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Cited Art Landscape
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