Method of manufacturing microlens, microlens, microlens array, electro-optical device, and electronic apparatus
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United States of America Patent
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May 13, 2008
Grant Date -
Mar 2, 2006
app pub date -
Jul 7, 2005
filing date -
Sep 1, 2004
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A method of manufacturing a microlens includes: forming on a transparent substrate an etching stop layer in a lens formation region where a curved lens surface of the microlens is to be formed, the etching stop layer having an island shape as a planar shape thereof; forming an intermediate layer on the etching stop layer; forming an etching mask layer on the intermediate layer, the etching mask layer having an opening at a position facing the etching stop layer; and etching, by means of isotropic etching, the intermediate layer from the opening, and etching the transparent substrate and the intermediate layer from a side of the etching stop layer.
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