MEMS device fabricated on a pre-patterned substrate
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United States of America Patent
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May 13, 2008
Grant Date -
Mar 30, 2006
app pub date -
Jul 1, 2005
filing date -
Sep 27, 2004
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A microelectromechanical systems device fabricated on a pre-patterned substrate having grooves formed therein. A lower electrode is deposited over the substrate and separated by an orthogonal upper electrode by a cavity. The upper electrode is configured to be movable to modulate reflected light. A semi-reflective layer and a transparent material are formed over the movable upper electrode.
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