Optically coupled resonant pressure sensor
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United States of America Patent
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May 27, 2008
Grant Date -
N/A
app pub date -
Dec 10, 2005
filing date -
Dec 12, 2004
priority date (Note) -
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Abstract
An optically coupled resonant pressure sensor includes a deformable diaphragm and an optically coupled resonator fixedly attached to the deformable diaphragm. The resonator includes a resonator body and a laterally offset photodiode adjacent to the resonator body. The resonator is driven by an electric field generated between the laterally offset photodiode and the resonator body when an incident light strikes the photodiode. Pressure applied to one side of the deformable diaphragm causes a shift in a resonant frequency of the resonator. Also disclosed are a method and system for determining pressure.
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