Load beam for surface acoustic wave accelerometer
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United States of America Patent
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Jun 3, 2008
Grant Date -
Jun 21, 2007
app pub date -
Dec 20, 2005
filing date -
Dec 20, 2005
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
Methods and systems for forming accelerometers include forming a load beam supported at one end having an input interdigital transducer (IDT) and an output IDT. The load-beam has a cross section varying in the longitudinal direction effective to cause the load beam to deflect radially in response to an applied load. The cross section varies in width, height, or both.
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