Gas valve assembly and apparatus using the same
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United States of America Patent
Stats
-
Jun 3, 2008
Grant Date -
Dec 23, 2004
app pub date -
Jun 16, 2004
filing date -
Jun 17, 2003
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A gas valve assembly for a deposition apparatus includes: a driving shaft including a plurality of gas supply paths therein; a housing surrounding the driving shaft and including a plurality of through holes therein; a plurality of magnetic seal pairs between the driving shaft and the housing, the plurality of magnetic seal pairs including a magnetic fluid; and a leakage-preventing means between the driving shaft and the housing, the leakage-preventing means preventing a leakage of the magnetic fluid.
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Cited Art Landscape
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