Substrate brush scrubbing and proximity cleaning-drying sequence using compatible chemistries, and method, apparatus, and system for implementing the same
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United States of America Patent
Stats
-
Jun 10, 2008
Grant Date -
Aug 31, 2006
app pub date -
Apr 27, 2006
filing date -
Mar 31, 2004
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
In one embodiment, a substrate preparation system is provided. The system includes a brush, a front head, and a back head. The brush is configured to brush scrub a back surface of a substrate using a brush scrubbing chemistry. The front head is defined in close proximity to a front surface of the substrate while the back head is defined in close proximity to the back surface of the substrate. The back head is positioned substantially opposite to the front head. The front head and the back head are applied as a pair to the substrate when the brush is apart from the substrate.
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Family
International Classification(s)
- Non-US Classification not provided for expired patents
Cited Art Landscape
Patent Citation Ranking
- Citation Ranking not provided for expired patents
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