Support structure for free-standing MEMS device and methods for forming the same
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United States of America Patent
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Jun 10, 2008
Grant Date -
Jan 3, 2008
app pub date -
Jun 28, 2006
filing date -
Jun 28, 2006
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A microelectromechanical (MEMS) device includes a functional layer including a first material and a deformable layer including a second material. The second material is different from the first material. The deformable layer is mechanically coupled to the functional layer at a junction. The functional layer and the deformable layer have substantially equal internal stresses at the junction.
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- Non-US Classification not provided for expired patents
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