US Patent No: 7,387,130
Number of patents in Portfolio can not be more than 2000
Cleaning solutions including nucleophilic amine compound having reduction and oxidation potentials
Stats
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Jun 17, 2008
Issued date -
Dec 5, 2006
filing date -
11/633,459
serial no -
Expired
status
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Abstract
A composition for removing resists and etching residue from substrates containing at least one nucleophilic amine compound having oxidation and reduction potentials, at least one organic solvent, water and, optionally, a chelating agent is described. The chelating agent is preferred to be included since it provides added stability and activity to the cleaning composition so that the composition has long term effectiveness. If a chelating agent is not present, the composition, while providing for adequate stripping and cleaning upon initial use of the composition following mixing, has only short term stability. In this latter instance, the nucleophilic amine compound and organic solvent components of the composition preferably are maintained separate from each other until it is desired to use the composition. Thereafter, the components are combined.
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First Claim
Related Publications
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International Classification(s)
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Cited Art
| Patent Info | (Count) | # Cites | Year |
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| 4,395,348 Photoresist stripping composition and method | 58 | 1981 | |
| 4,824,763 Triamine positive photoresist stripping composition and prebaking process | 65 | 1987 | |
| 5,279,771 Stripping compositions comprising hydroxylamine and alkanolamine | 77 | 1990 | |
| 5,399,464 Triamine positive photoresist stripping composition and post-ion implantation baking | 26 | 1992 | |
| 5,334,332 Cleaning compositions for removing etching residue and method of using | 143 | 1992 | |
| 5,381,807 Method of stripping resists from substrates using hydroxylamine and alkanolamine | 50 | 1993 | |
| 5,482,566 Method for removing etching residue using a hydroxylamine-containing composition | 56 | 1994 | |
| 6,187,730 Hydroxylamine-gallic compound composition and process | 12 | 1996 | |
| 6,110,881 Cleaning solutions including nucleophilic amine compound having reduction and oxidation potentials | 22 | 1996 | |
| 5,911,835 Method of removing etching residue | 49 | 1997 | |
| 6,399,551 Alkanolamine semiconductor process residue removal process | 7 | 1999 | |
| 6,564,812 Alkanolamine semiconductor process residue removal composition and process | 5 | 2002 | |
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| 4,187,140 Method for etching silicon and a residue and oxidation resistant etchant therefor | 13 | 1978 | |
| 4,238,275 Pyrocatechol-amine-water solution for the determination of defects | 21 | 1978 | |
| 4,276,186 Cleaning composition and use thereof | 81 | 1979 | |
| 4,929,301 Anisotropic etching method and etchant | 24 | 1986 | |
| 5,049,201 Method of inhibiting corrosion in an electronic package | 18 | 1989 | |
| 4,941,941 Method of anisotropically etching silicon wafers and wafer etching solution | 25 | 1989 | |
| 5,091,103 Photoresist stripper | 61 | 1990 | |
| 5,374,454 Method for conditioning halogenated polymeric materials and structures fabricated therewith | 56 | 1993 | |
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| 5,185,235 Remover solution for photoresist | 57 | 1990 | |
| 5,795,702 Photoresist stripping liquid compositions and a method of stripping photoresists using the same | 62 | 1996 | |
| 5,792,274 Remover solution composition for resist and method for removing resist using the same | 54 | 1996 | |
| 6,068,000 Substrate treatment method | 26 | 1997 | |
| 5,968,848 Process for treating a lithographic substrate and a rinse solution for the treatment | 39 | 1997 | |
| 6,225,034 Photoresist stripping liquid compositions and a method of stripping photoresists using the same | 4 | 1998 | |
| 6,291,142 Photoresist stripping liquid compositions and a method of stripping photoresists using the same | 6 | 2000 | |
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| 4,395,479 Stripping compositions and methods of stripping resists | 28 | 1982 | |
| 4,428,871 Stripping compositions and methods of stripping resists | 43 | 1982 | |
| 4,401,747 Stripping compositions and methods of stripping resists | 30 | 1982 | |
| 4,403,029 Stripping compositions and methods of stripping resists | 37 | 1982 | |
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| 4,282,111 Hydroquinone as an oxygen scavenger in an aqueous medium | 41 | 1980 | |
| 4,289,645 Hydroquinone and mu-amine compositions | 43 | 1980 | |
| 4,549,968 Method of utilizing improved stability oxygen scavenger compositions | 28 | 1984 | |
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| 4,278,635 Method for deoxygenation of water | 47 | 1979 | |
| 4,350,606 Composition and method for inhibiting corrosion | 44 | 1980 | |
| 5,022,926 Corrosion control | 20 | 1989 | |
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| 4,770,713 Stripping compositions containing an alkylamide and an alkanolamine and use thereof | 64 | 1988 | |
| 5,419,779 Stripping with aqueous composition containing hydroxylamine and an alkanolamine | 65 | 1993 | |
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| 4,264,716 Photographic color developer compositions | 48 | 1979 | |
| 4,482,626 Photographic color developer compositions | 34 | 1984 | |
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| 4,242,218 Phenol-free photoresist stripper | 23 | 1976 | |
| 4,221,674 Organic sulfonic acid stripping composition and method with nitrile and fluoride metal corrosion inhibitor system | 32 | 1979 | |
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| 4,276,185 Methods and compositions for removing deposits containing iron sulfide from surfaces comprising basic aqueous solutions of particular chelating agents | 47 | 1980 | |
| 4,861,386 Enhanced cleaning procedure for copper alloy equipment | 14 | 1988 | |
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| 5,094,814 All-volatile multi-functional oxygen and carbon dioxide corrosion control treatment for steam systems | 15 | 1990 | |
| 5,091,108 Method of retarding corrosion of metal surfaces in contact with boiler water systems which corrosion is caused by dissolved oxygen | 16 | 1991 | |
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| RE30714 Removal of copper containing incrustations from ferrous surfaces | 18 | 1978 | |
| RE30796 Scale removal, ferrous metal passivation and compositions therefor | 25 | 1978 | |
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| 4,268,406 Liquid detergent composition | 58 | 1980 | |
| 4,732,797 Wet wiper natural acid preservation system | 73 | 1987 | |
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| 5,562,963 Absorbent pads for containment, neutralization, and clean-up of environmental spills containing chemically-reactive agents | 4 | 1994 | |
| 5,683,813 Absorbent pads for containment, neutralization, and clean-up of environmental spills containing chemically-reactive agents | 8 | 1996 | |
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| 4,363,741 Automotive cooling system cleaner | 12 | 1981 | |
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| 4,732,887 Composite porous material, process for production and separation of metallic element | 35 | 1985 | |
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| 5,407,788 Photoresist stripping method | 26 | 1993 | |
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| 5,308,745 Alkaline-containing photoresist stripping compositions producing reduced metal corrosion with cross-linked or hardened resist resins | 98 | 1992 | |
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| 5,073,622 Process for the preparation of novolak resins with low metal ion content | 45 | 1990 | |
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| 4,895,703 Trihydroxybenzene boiler corrosion inhibitor compositions and method | 23 | 1988 | |
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| 5,288,332 A process for removing corrosive by-products from a circuit assembly | 39 | 1993 | |
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| 4,765,844 Solvents for photoresist removal | 30 | 1986 | |
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| 5,342,543 Neutralizing absorbent for acids and bases | 13 | 1992 | |
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| 4,744,834 Photoresist stripper comprising a pyrrolidinone, a diethylene glycol ether, a polyglycol and a quaternary ammonium hydroxide | 57 | 1986 | |
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| 4,554,049 Selective nickel stripping compositions and method of stripping | 20 | 1984 | |
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| 5,043,252 Developer composition for PS plates for use in making lithographic printing plate and method of plate-making | 7 | 1990 | |
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| 5,798,323 Non-corrosive stripping and cleaning composition | 41 | 1997 | |
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| 5,015,298 Composition and method for removing iron containing deposits from equipment constructed of dissimilar metals | 24 | 1990 | |
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| 4,873,136 Method for preparing polymer surfaces for subsequent plating thereon, and improved metal-plated plastic articles made therefrom | 34 | 1988 | |
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| 4,626,411 Composition and method for deoxygenation | 40 | 1985 | |
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| 4,279,870 Liquid-liquid extraction process for the recovery of tungsten from low level sources | 19 | 1980 | |
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| 4,737,195 Activator-accelerator mixtures for alkaline paint stripper compositions | 23 | 1986 | |
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| 4,824,949 Process for the preparation of pyrimidines | 15 | 1987 | |
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| 5,143,592 Process for preparing nonconductive substrates | 21 | 1990 | |
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| 4,786,578 Agent and method for the removal of photoresist and stripper residues from semiconductor substrates | 50 | 1987 | |
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| 4,699,868 Photographic tanning developer formulation | 17 | 1986 | |
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| 4,980,077 Method for removing alkaline sulfate scale | 28 | 1989 | |
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| 4,617,251 Stripping composition and method of using the same | 112 | 1985 | |
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| 5,746,837 Process for treating an aluminum can using a mobility enhancer | 10 | 1997 | |
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| 4,284,435 Method for spray cleaning painted surfaces | 37 | 1979 | |
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| 4,539,230 Method for preventing deposition of polymer scale and a coating agent therefor | 33 | 1984 | |
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| 5,141,803 Nonwoven wipe impregnating composition | 95 | 1991 | |
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| 4,239,661 Surface-treating agent adapted for intermediate products of a semiconductor device | 71 | 1978 | |
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| 4,834,912 Composition for cleaning a gas turbine engine | 40 | 1987 | |
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| 4,509,989 Cleaning method for removing sulfur containing deposits from coke oven gas lines | 16 | 1983 | |
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| 5,290,361 Surface treating cleaning method | 172 | 1992 | |
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| 4,769,084 Synthetic chemical adsorbents | 6 | 1987 | |
Patent Citation Ranking
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 7.5 Year Payment | $3600.00 | $1800.00 | $900.00 | Dec 17, 2015 |
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Dec 17, 2019 |
| Fee | Large entity fee | small entity fee | micro entity fee |
|---|---|---|---|
| Surcharge - 7.5 year - Late payment within 6 months | $160.00 | $80.00 | $40.00 |
| Surcharge - 11.5 year - Late payment within 6 months | $160.00 | $80.00 | $40.00 |
| Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
| Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |