Method and apparatus for thin-film battery having ultra-thin electrolyte
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United States of America Patent
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Jun 24, 2008
Grant Date -
Oct 18, 2007
app pub date -
Mar 27, 2007
filing date -
Mar 24, 2000
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Abstract
A method and system for fabricating solid-state energy-storage devices including fabrication films for devices without an anneal step. A film of an energy-storage device is fabricated by depositing a first material layer to a location on a substrate. Energy is supplied directly to the material forming the film. The energy can be in the form of energized ions of a second material. Supplying energy directly to the material and/or the film being deposited assists in controlling the growth and stoichiometry of the film. The method allows for the fabrication of ultrathin films such as electrolyte films and dielectric films.
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