Method of forming compliant contact structures
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United States of America Patent
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-
Jun 24, 2008
Grant Date -
Sep 15, 2005
app pub date -
May 3, 2005
filing date -
Oct 14, 2003
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A compliant contact structure and contactor card for operably coupling with a semiconductor device to be tested includes a substantially planar substrate with a compliant contact formed therein. The compliant contact structure includes a portion fixed within the substrate and at least another portion integral with the fixed portion, laterally unsupported within a thickness of the substrate and extending beyond a side thereof. Dual-sided compliant contact structures, methods of forming compliant contact structures, a method of testing a semiconductor device and a testing system are also disclosed.
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