Pressure sensor for detecting small pressure differences and low pressures

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 7389697
APP PUB NO 20060000289A1
SERIAL NO

11134001

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A capacitive pressure sensor of substantially ceramic material comprises a thick base plate (100), a front plate (140) having the same thickness as the base plate and a movable diaphragm (120) located between the front plate and the base plate. Capacitor electrodes (121b, 121a) are provided at the surface of the diaphragm facing the base plate and form a measurement capacitor. The diaphragm (120) is extremely thin and is produced by sintering a ceramic material such aluminum oxide. Owing to a pressing process used during the sintering a strong, very thin diaphragm is obtained having no mechanical stresses and fracture indications. It can be produced to have a very small thickness in order to provide pressure sensors having a high sensitivity, which can also for high-vacuum applications tolerate to be subjected to the atmospheric pressure. A shielding plate (110) can be inserted between the base plate (100) compensating the measurement capacitor. The shielding plate (110) can also be extremely thin, having a thickness down to a thickness corresponding to the thickness of a diaphragm (120).

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First Claim

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Patent Owner(s)

Patent OwnerAddressTotal Patents
MKS INSTRUMENTS, INC.WILMINGTON, MA467

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Jonsson, Steffan Karlskoga, SE 3 17

Cited Art Landscape

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* Cited By Examiner

Patent Citation Ranking

Forward Cite Landscape

Patent Info (Count) # Cites Year
 
ROSEMOUNT INC. (2)
* 9057659 Pressure transmitter with hydrogen getter 0 2012
* 2013/0312,531 PRESSURE TRANSMITTER WITH HYDROGEN GETTER 2 2012
 
AMS INTERNATIONAL AG (2)
* 9016133 Pressure sensor with pressure-actuated switch 0 2011
* 2012/0167,659 PRESSURE SENSOR WITH PRESSURE-ACTUATED SWITCH 6 2011
 
VEGA GRIESHABER KG (2)
* 8468894 Measuring cell and a method of use therefor 0 2010
* 2011/0100,130 MEASURING CELL AND A METHOD OF USE THEREFOR 2 2010
 
MKS INSTRUMENTS, INC. (2)
8887575 Pressure sensor 0 2012
9499393 Stress relief MEMS structure and package 0 2015
* Cited By Examiner

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