US Patent No: 7,389,697

Number of patents in Portfolio can not be more than 2000

Pressure sensor for detecting small pressure differences and low pressures

ALSO PUBLISHED AS: 20060000289

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Abstract

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A capacitive pressure sensor of substantially ceramic material comprises a thick base plate (100), a front plate (140) having the same thickness as the base plate and a movable diaphragm (120) located between the front plate and the base plate. Capacitor electrodes (121b, 121a) are provided at the surface of the diaphragm facing the base plate and form a measurement capacitor. The diaphragm (120) is extremely thin and is produced by sintering a ceramic material such aluminum oxide. Owing to a pressing process used during the sintering a strong, very thin diaphragm is obtained having no mechanical stresses and fracture indications. It can be produced to have a very small thickness in order to provide pressure sensors having a high sensitivity, which can also for high-vacuum applications tolerate to be subjected to the atmospheric pressure. A shielding plate (110) can be inserted between the base plate (100) compensating the measurement capacitor. The shielding plate (110) can also be extremely thin, having a thickness down to a thickness corresponding to the thickness of a diaphragm (120).

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Patent Owner(s)

Patent OwnerAddressTotal Patents
MKS INSTRUMENTS, INC.WILMINGTON, MA493

International Classification(s)

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  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Jonsson, Steffan Karlskoga, SE 4 6

Cited Art Landscape

Patent Info (Count) # Cites Year
 
MKS INSTRUMENTS, INC. (18)
4,785,669 Absolute capacitance manometers 61 1987
5,625,152 Heated pressure transducer assembly 19 1996
5,808,206 Heated pressure transducer assembly 18 1996
5,811,685 Fluid pressure sensor with contaminant exclusion system 16 1996
5,942,692 Capacitive pressure sensing method and apparatus avoiding interelectrode capacitance by driving with in-phase excitation signals 18 1997
5,932,332 Heated pressure transducer assembly 18 1997
5,911,162 Capacitive pressure transducer with improved electrode support 55 1997
5,965,821 Pressure sensor 58 1997
5,920,015 Pressure sensor with capacitor electrodes and shield layer parallel thereto 11 1997
6,029,525 Capacitive based pressure sensor design 26 1998
6,105,436 Capacitive pressure transducer with improved electrode support 22 1999
6,439,056 Sensor element having temperature measuring means 20 1999
6,735,845 Method of producing an integrated reference pressure sensor element 12 1999
6,443,015 Baffle for a capacitive pressure sensor 12 1999
6,568,274 Capacitive based pressure sensor design 36 2000
6,772,640 Multi-temperature heater for use with pressure transducers 17 2000
6,612,176 Pressure transducer assembly with thermal shield 14 2000
6,588,280 Pressure transducer with compensation for thermal transients 12 2002
 
Setra Systems, Inc. (10)
4,358,814 Capacitive pressure sensor 57 1980
4,434,203 Diaphragm 23 1980
4,464,725 Temperature compensated measuring system 37 1983
5,150,275 Capacitive pressure sensor 31 1991
5,442,962 Capacitive pressure sensor having a pedestal supported electrode 53 1993
5,542,300 Low cost, center-mounted capacitive pressure sensor 49 1994
5,604,315 Apparatus using a feedback network to measure fluid pressures 35 1995
6,019,002 Pressure transducer having a tensioned diaphragm 16 1997
5,939,639 Pressure transducer housing with barometric pressure isolation 41 1997
6,205,861 Transducer having temperature compensation 29 1999
 
ROSEMOUNT INC. (8)
4,389,895 Capacitance pressure sensor 70 1981
4,598,381 Pressure compensated differential pressure sensor and method 99 1983
4,603,371 Capacitive sensing cell made of brittle material 25 1984
4,730,496 Capacitance pressure sensor 54 1986
4,944,187 Multimodulus pressure sensor 49 1988
5,343,755 Strain gage sensor with integral temperature signal 14 1993
5,333,637 Pneumatic instrument particle trap 15 1993
6,516,671 Grain growth of electrical interconnection for microelectromechanical systems (MEMS) 21 2001
 
KAVLICO CORPORATION (7)
4,426,673 Capacitive pressure transducer and method of making same 58 1980
4,425,799 Liquid capacitance pressure transducer technique 40 1982
4,735,098 Dual diaphragm differential pressure transducer 32 1986
5,020,377 Low pressure transducer using metal foil diaphragm 25 1990
5,315,877 Low cost versatile pressure transducer 39 1993
5,349,865 Wide-pressure-range, adaptable, simplified pressure transducer 27 1993
6,148,674 Shielded capacitive pressure sensor 13 1999
 
ENDRESS + HAUSER GMBH + CO. KG (5)
5,005,421 Pressure sensor and method for the manufacture thereof 40 1989
5,001,595 Capacitive pressure sensor and method of manufacturing same 27 1990
5,050,034 Pressure sensor and method of manufacturing same 45 1990
5,539,611 Interface connection through an insulating part 34 1992
5,351,938 Apparatus for fabricating a foil 12 1993
 
TEXAS INSTRUMENTS INCORPORATED (4)
5,525,280 Method of making a pressure transducer apparatus 17 1994
5,485,345 Pressure transducer apparatus 15 1994
5,499,158 Pressure transducer apparatus with monolithic body of ceramic material 30 1994
6,209,398 Fluid pressure transducer apparatus and method for assembling 21 1998
 
HITACHI, LTD. (3)
4,495,820 Capacitive pressure sensor 58 1982
5,756,899 Integrated sensor 36 1997
2005/0186,696 Gas flowmeter and manufacturing method thereof 2005
 
SAES GETTERS S.P.A. (3)
5,544,490 Device for maintaining a vacuum in a thermally insulating jacket and method of making such device 17 1995
5,916,479 Mercury dispensing device 12 1997
5,885,682 Vacuum heat insulation panel 14 1998
 
Vaisala Oy (3)
4,229,776 Capacitive capsule for aneroid pressure gauge 17 1978
4,628,403 Capacitive detector for absolute pressure 32 1985
5,531,128 Capacitive transducer feedback-controlled by means of electrostatic force and method for controlling the profile of the transducing element in the transducer 15 1994
 
Allied Signal (2)
4,864,463 Capacitive pressure sensor 57 1988
5,189,591 Aluminosilicate glass pressure transducer 33 1992
 
BALZERS HOCHVAKUUM GMBH, A CORP. OF SWITZERLAND (2)
6,528,008 Process for producing membrane for capacitive vacuum measuring cell 9 1998
6,591,687 Capacitive vacuum measuring cell 24 1998
 
EATON CORPORATION (2)
5,186,055 Hermetic mounting system for a pressure transducer 56 1991
5,541,561 Integral electrical circuit controller 13 1993
 
ENVEC MESS- UND REGELTECHNIK GMBH + CO. (2)
5,836,063 Method for producing capacitive ceramic absolute pressure sensors sorted in zero-point long-term stability defect classes 18 1997
6,578,427 Capacitive ceramic relative-pressure sensor 13 2000
 
FUJI ELECTRIC CO., LTD. (2)
4,769,738 Electrostatic capacitive pressure sensor 24 1987
5,925,824 Capacitive differential pressure detector 12 1997
 
Honeywell Inc. (2)
4,735,090 Flange mounted pressure transmitter 17 1986
5,275,055 Resonant gauge with microbeam driven in constant electric field 44 1992
 
LAM RESEARCH CORPORATION (2)
6,451,159 Grounded centering ring for inhibiting polymer build-up on the diaphragm of a manometer 12 2000
6,901,808 Capacitive manometer having reduced process drift 16 2003
 
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. (2)
5,507,080 Method of manufacturing a capacitance sensor 13 1994
5,719,740 Capacitance sensor 13 1996
 
Nagano Keiki Seisakusho, Ltd. (2)
5,561,247 Pressure sensor 16 1994
5,571,970 Pressure sensor 18 1994
 
NGK INSULATORS, LTD. (2)
4,920,805 Pressure sensor having baffling means 16 1988
4,898,035 Pressure sensor having sealing member for sealing housing interior with respect to external space 23 1989
 
SENSATA TECHNOLOGIES, INC. (2)
4,774,626 Pressure sensor with improved capacitive pressure transducer 26 1987
5,544,399 Method for making a pressure transducer 26 1995
 
The Bendix Corporation (2)
4,422,335 Pressure transducer 68 1981
4,422,125 Pressure transducer with an invariable reference capacitor 59 1982
 
VERIZON PATENT AND LICENSING INC. (2)
2005/0021,713 Intelligent network 1 2004
2005/0021,713 Intelligent network 1 2004
 
ABB KENT-TAYLOR INC. (1)
4,458,537 High accuracy differential pressure capacitive transducer 58 1981
 
ADVANCED MICRO ELECTRONIC COMPONENTS AND SYSTEMS THEOPHIEL (1)
4,679,643 Capacitive weighing device 17 1986
 
ALLERGAN MEDICAL OPTICS (1)
4,714,464 Mechanism for coupling the aspirant line of an irrigation/aspiration machine to the pressure monitoring section 27 1986
 
APPLIED MATERIALS, INC. (1)
6,423,949 Multi-zone resistive heater 40 1999
 
ASAHI GLASS COMPANY, LIMITED (1)
5,348,568 Filtering method of flue gas of a boiler and a filter apparatus for hot gas 15 1993
 
Bell Microcomponents, Inc. (1)
4,562,742 Capacitive pressure transducer 60 1985
 
Bell Microsensors, Inc. (1)
4,670,733 Differential pressure transducer 44 1985
 
CATERPILLAR GLOBAL MINING EUROPE GMBH (1)
6,112,597 Circuit board connection for a pressure sensor used in mining hydraulics 12 1997
 
CECAP AB (1)
6,122,976 Pressure sensor with housing, sensor element having ceramic components, and support ring mounting sensor element to housing 11 1997
 
CELERITY, INC. (1)
4,823,603 Capacitance manometer having stress relief for fixed electrode 37 1988
 
CERCEO, JOSEPH A., (1)
4,567,773 Pressure transducer system 14 1984
 
DELCO ELECTRONICS CORPORATION (1)
4,850,227 Pressure sensor and method of fabrication thereof 70 1987
 
Donaldson Company, Inc. (1)
4,851,015 Muffler apparatus with filter trap and method of use 79 1987
 
DRESSER-NAGANO, INC. (1)
5,048,165 Method for controlling the sensitivity and linearity of capacitive transducer systems 17 1990
 
EDWARDS VACUUM, INC. (1)
5,271,277 Capacitance pressure transducer 30 1991
 
FUJIKOKI CORPORATION (1)
4,977,480 Variable-capacitance type sensor and variable-capacitance type sensor system using the same 67 1989
 
Goldstar Co., Ltd. (1)
5,443,410 Getter fixing device for a cathode ray tube 11 1994
 
Hokushin Electric Works, Ltd. (1)
4,357,834 Displacement converter 24 1980
 
HONDA GIKEN KOGYO KABUSHIKI KAISHA (1)
4,733,875 Vehicle height control apparatus 13 1986
 
Illumination Technology, Inc. (1)
5,800,235 Process for manufacturing incandescent lamps having gettering agents 10 1996
 
INTERIA OPTICAL TECHNOLOGY APPLICATIONS, INC. (1)
4,765,188 Pressure transducer with integral digital temperature compensation 71 1986
 
JOHNSON SERVICE COMPANY (1)
4,542,436 Linearized capacitive pressure transducer 75 1984
 
Johnsson & Billquist Development AB (1)
4,935,841 Pressure sensor 15 1989
 
JONSSON & BILLQUIST DEVELOPMENT AB (1)
5,249,469 Pressure gauge 11 1991
 
KABUSHIKI KAISHA TOYOTA CHUO KENKYUSHO (1)
5,291,534 Capacitive sensing device 26 1992
 
KONINKLIJKE PHILIPS ELECTRONICS N.V. (1)
4,572,204 Pressure dome with compliant chamber 16 1984
 
LEYBOLD AKTIENGESELLSCHAFT (1)
5,257,542 Sensor for a capacitance pressure gauge 32 1991
 
MACLEAN-FOGG COMPANY (1)
5,155,653 Capacitive pressure sensor 27 1991
 
MITSUBISHI DENKI KABUSHIKI KAISHA (1)
4,815,324 Intake air meter for an internal combustion engine 28 1987
 
Mitutoyo Mfg. Co., Ltd. (1)
4,748,861 Electronic display measuring device 16 1986
 
MOTOROLA, INC. (1)
4,807,477 Capacitive temperature compensation for a pressure sensor 19 1988
 
NATIONAL SEMICONDUCTOR CORPORATION (1)
6,012,335 High sensitivity micro-machined pressure sensors and acoustic transducers 64 1997
 
OMRON HEALTHCARE CO., LTD. (1)
6,315,734 Pulse-wave propagation information obtaining apparatus 20 2000
 
PACIFIC INDUSTRIAL CO., LTD. (1)
6,340,929 Transmitter and external controller of tire inflation pressure monitor 44 1999
 
Panex Corporation (1)
4,875,368 Pressure sensor system 24 1988
 
RCA LICENSING CORPORATION, TWO INDEPENDENCE WAY, PRINCETON, NJ 08540, A CORP. OF DE (1)
4,302,063 Method for vaporizing getter material in a vacuum electron tube 15 1980
 
SIEMENS INDUSTRY, INC. (1)
6,029,524 Transducer having redundant pressure sensors 26 1997
 
Signagraphics Corporation (1)
5,369,228 Data input device with a pressure-sensitive input surface 60 1992
 
SILENTOR NOTOX A/A (1)
5,497,620 Method of filtering particles from a flue gas, a flue gas filter means and a vehicle 57 1992
 
Societe Anonyme: Vectavib (1)
5,311,140 Circuit for measuring variations in the capacitance of a variable capacitor using a continuously rebalanced detection bridge 16 1992
 
STANLEY ELECTRIC CO., LTD. (1)
4,334,725 Method for making a fluorescent lamp 13 1980
 
Stir-Melter, Inc. (1)
5,603,684 Method for vitrification of hazardous waste 15 1996
 
STOCK EQUIPMENT COMPANY, INC. (1)
4,424,713 Silicon diaphragm capacitive pressure transducer 40 1982
 
THE BOARD OF TRUSTEES OF THE LELAND STANFORD JUNIOR UNIVERSITY (1)
4,943,032 Integrated, microminiature electric to fluidic valve and pressure/flow regulator 132 1988
 
The BOC Group, Inc. (1)
4,499,773 Variable capacitance pressure transducer 14 1983
 
THE REGENTS OF THE UNIVERSITY OF CALIFORNIA (1)
5,188,780 Method for preparation of dense ceramic products 18 1991
 
The United States of America as represented by the Administrator of the National Aeronautics and Space Administration (1)
6,845,664 MEMS direct chip attach packaging methodologies and apparatuses for harsh environments 32 2002
 
Tward 2001 Limited (1)
4,433,580 Pressure transducer 18 1982
 
VACUUM GENERAL, INC. (1)
4,587,851 High vacuum capacitance manometer having Px side open housing 15 1985
 
VANGUARD INTERNATIONAL SEMICONDUCTOR CORPORATION (1)
5,948,169 Apparatus for preventing particle deposition in a capacitance diaphragm gauge 14 1998
 
WALBRO CORPORATION (1)
5,351,548 Capacitive pressure sensor 26 1992
 
WIKA ALEXANDER WIEGAND GMBH & CO. KG (1)
6,105,437 Pressure transducer 47 1998
 
YAMATAKE-HONEYWELL CO., LTD. (1)
5,349,492 Capacitive pressure sensor 57 1992
 
Other [Check patent profile for assignment information] (10)
4,322,775 Capacitive pressure sensor 46 1979
4,381,492 Apparatus for magnetizing multipolar permanent magnets 10 1981
4,691,574 Capacitance transducer 18 1986
4,738,276 Modular differential pressure transmitter/manifold for a fluid conveying pipeline 47 1986
5,134,887 Pressure sensors 35 1989
5,165,281 High pressure capacitive transducer 23 1989
5,279,163 Sensor and transducer apparatus 32 1990
5,499,533 Downhole pressure gauge converter 19 1992
5,400,489 Method of stabilizing the surface properties of objects to be thermally treated in a vacuum 27 1992
6,119,524 Measuring indicator device 13 1999

Patent Citation Ranking

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Patent Info (Count) # Cites Year
 
VEGA GRIESHABER KG (1)
8,468,894 Measuring cell and a method of use therefor 0 2010

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