US Patent No: 7,389,697
Number of patents in Portfolio can not be more than 2000
Pressure sensor for detecting small pressure differences and low pressures
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Jun 24, 2008
Issued date -
May 20, 2005
filing date -
11/134,001
serial no -
In Force
status
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Abstract
A capacitive pressure sensor of substantially ceramic material comprises a thick base plate (100), a front plate (140) having the same thickness as the base plate and a movable diaphragm (120) located between the front plate and the base plate. Capacitor electrodes (121b, 121a) are provided at the surface of the diaphragm facing the base plate and form a measurement capacitor. The diaphragm (120) is extremely thin and is produced by sintering a ceramic material such aluminum oxide. Owing to a pressing process used during the sintering a strong, very thin diaphragm is obtained having no mechanical stresses and fracture indications. It can be produced to have a very small thickness in order to provide pressure sensors having a high sensitivity, which can also for high-vacuum applications tolerate to be subjected to the atmospheric pressure. A shielding plate (110) can be inserted between the base plate (100) compensating the measurement capacitor. The shielding plate (110) can also be extremely thin, having a thickness down to a thickness corresponding to the thickness of a diaphragm (120).
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First Claim
Related Publications
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International Classification(s)
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- [Patents Count]
Cited Art
| Patent Info | (Count) | # Cites | Year |
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| 5,351,548 Capacitive pressure sensor | 26 | 1992 | |
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| 6,105,437 Pressure transducer | 41 | 1998 | |
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| 5,349,492 Capacitive pressure sensor | 56 | 1992 | |
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| 4,691,574 Capacitance transducer | 18 | 1986 | |
| 4,738,276 Modular differential pressure transmitter/manifold for a fluid conveying pipeline | 47 | 1986 | |
| 5,134,887 Pressure sensors | 34 | 1989 | |
| 5,165,281 High pressure capacitive transducer | 23 | 1989 | |
| 5,279,163 Sensor and transducer apparatus | 29 | 1990 | |
| 5,499,533 Downhole pressure gauge converter | 19 | 1992 | |
| 5,400,489 Method of stabilizing the surface properties of objects to be thermally treated in a vacuum | 27 | 1992 | |
| 6,119,524 Measuring indicator device | 12 | 1999 | |
Patent Citation Ranking
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
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| 7.5 Year Payment | $3600.00 | $1800.00 | $900.00 | Dec 24, 2015 |
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| Fee | Large entity fee | small entity fee | micro entity fee |
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