Proximity meniscus manifold
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United States of America Patent
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Jun 24, 2008
Grant Date -
Jun 30, 2005
app pub date -
Apr 1, 2004
filing date -
Sep 30, 2002
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
An apparatus for processing a substrate is provided which includes a first manifold module to generate a fluid meniscus on a substrate surface. The apparatus also includes a second manifold module to connect with the first manifold module and also to move the first manifold module into close proximity to the substrate surface to generate the fluid meniscus.
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