High fill-ratio mirror-based spatial light modulator
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United States of America Patent
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Jun 24, 2008
Grant Date -
Mar 13, 2008
app pub date -
Aug 25, 2006
filing date -
Aug 25, 2006
priority date (Note) -
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Abstract
A spatial light modulator includes a two-dimensional array of hexagonal mirror plates disposed in a honeycomb pattern over a substrate. Each of the hexagonal mirror plates is supported by one or more structural members. There is a gap between adjacent hexagonal mirror plates. The structural members are not located in the gap.
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