Micro column electron beam apparatus formed in low temperature co-fired ceramic substrate
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United States of America Patent
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-
Jul 1, 2008
Grant Date -
Jun 22, 2006
app pub date -
Oct 24, 2005
filing date -
Dec 20, 2004
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A micro column electron beam apparatus having a reduced number of interconnections is provided. The micro column electron beam apparatus includes: a low temperature co-fired ceramic (LTCC) substrate; a plurality of deflector electrodes attached to a predetermined top portion of the LTCC substrate; a pad electrode placed at a top edge of the LTCC substrate and transmitting an external signal to the deflector electrodes; and a connection unit placed in the LTCC substrate and electrically connecting the deflector electrode and the pad electrode.
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