Method of electro migration testing
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United States of America Patent
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Jul 1, 2008
Grant Date -
N/A
app pub date -
Feb 6, 2007
filing date -
Feb 6, 2007
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A method of determining the time to failure of parallel electro migration test structures is described. The method generally includes the steps of: measuring the resistance of the complete structure; calculating the resistance of the n individual parallel structures from the measured resistance; calculating the resistance of the complete structure after the failure of m individual parallel structures, for m=1 to n; and recording the time of failure for each m as the time when the resistance is approximately the value predicted for m fails.
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