Back end of line clone test vehicle
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United States of America Patent
Stats
-
Jul 1, 2008
Grant Date -
Apr 21, 2005
app pub date -
Feb 27, 2003
filing date -
Feb 28, 2002
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A test vehicle comprises at least one product layer having a east one product circuit pattern on the product layer, and one or more clone layers formed over the product layer (1902). The one or more clone layers include a plurality of structures, which may include clone test vehicle circuit patterns and/or clone test vehicle vias (1902). The presence of one or more defects (1904) in the one or more clone layers (1908) is an indicator of a tendency of the product circuit pattern to impact yield of a succeeding layer to be formed over the product circuit pattern in a product (1910).
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