Synchronization technique for forming a substantially stable laser output pulse profile having different wavelength peaks
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United States of America Patent
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Jul 8, 2008
Grant Date -
Jun 15, 2006
app pub date -
Feb 25, 2005
filing date -
Dec 9, 2004
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Abstract
A specially shaped laser pulse energy profile characterized by different laser wavelengths at different times of the profile provides reduced, controlled jitter to enable semiconductor device micromachining that achieves high quality processing and a smaller possible spot size.
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