Probe for a scanning microscope
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United States of America Patent
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-
Jul 15, 2008
Grant Date -
Jul 13, 2006
app pub date -
Jun 6, 2005
filing date -
Jun 9, 2004
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A scanning microscope probe in which a palladium covering film is formed on the surface of the protruding portion of a cantilever, and the base end portion of a nanotube is disposed in contact with the palladium covering film with the tip end portion of the nanotube protruding to the outside, thus allowing the tip end to be used as a probe needle end for detecting signals. A coating film is formed to cover all or part of the surface of this base end portion, and the nanotube is thus firmly fastened to the cantilever. Since the base end portion adheres tightly to the palladium covering film, both of them are electrically continuous. This palladium covering film allows, as an electrode film, the application of a voltage to the nanotube or the passage of an electric current through the nanotube, showing also good adhesion to the nanotube and cantilever.
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