Nano-VCSEL device and fabrication thereof using nano-colonnades

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United States of America Patent

PATENT NO 7400665
APP PUB NO 20060098705A1
SERIAL NO

11084886

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A nano-colonnade VCSEL device and a method of fabrication utilize a nanowire column grown nearly vertically from a (111) horizontal surface of a first layer to another horizontal surface of a second layer to connect the layers. The VCSEL device includes a first layer having the (111) horizontal surface; a second layer; and an insulator support between the first layer and the second layer that separates the first layer from the second layer. A portion of the second layer overhangs the insulator support, such that a horizontal surface of the overhanging portion is spaced from and faces the (111) horizontal surface of the first layer. The VCSEL device further includes a nanowire column extending nearly vertically from the (111) horizontal surface to the facing horizontal surface, and distributed Bragg mirrors adjacent to opposite end of the nanowire column.

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Patent Owner(s)

Patent OwnerAddress
SAMSUNG ELECTRONICS CO LTDSUWON-SI GYEONGGI-DO

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Beausoleil, Raymond G Redmond, WA 211 3669
Islam, M Saif Sacramento, CA 40 974
Wang, Shih-Yuan Palo Alto, CA 324 4663

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